The application of deconvolution methods in electron spectroscopy — a review

Abstract In this review of the application of deconvolution in electron spectroscopy the operations of convolution and deconvolution are first defined. The theoretical background to direct methods, Fourier Transform techniques and iterative approaches to deconvolution is given. The use of smoothing techniques, the removal of secondary electron background and the determination of broadening functions are then considered. Examples of deconvolution in electron spectroscopy are discussed. These include valence and core levels in XPS, gas-phase UPS studies and resolution enhancement in Auger spectroscopy. Deconvolution of Auger spectra to yield density of states curves is examined. The likely future status of deconvolution in electron spectroscopy is considered.

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