论文信息 - Impact of sputter deposition parameters on the microstructural and piezoelectric properties of Cr x Al 1-x N thin films - 字舞流文

Impact of sputter deposition parameters on the microstructural and piezoelectric properties of Cr x Al 1-x N thin films

U. Schmid | M. Schneider | P. Mayrhofer | E. Wistrela | A. Bittner | M. Gillinger | I. Schmied