Plasma diagnostics in pulsed laser deposition of GaLaS chalcogenides

Abstract The aim of this work is to characterize the ejection plume obtained by laser ablation of GaLaS (GLS) samples in order to better understand the ablation phenomena for optimizing the pulsed laser deposition of chalcogenide thin films. The dynamics of the plasma between target and substrate was investigated through time- and space-resolved optical emission spectroscopy. High-resolution optical spectra have been recorded in the UV–VIS range using a 500-mm focal length monochromator and a fast gate ICCD camera. From the space–time evolution of the optical signals, the velocities of various species (including neutrals and ions) have been derived. Using the relative intensity method, the space- and time-evolution of the excitation temperature and electronic density have been determined. A complex behavior of the laser ablation plasma has been revealed.

[1]  C. Focsa,et al.  Photo-excited desorption of multi-component systems : Application to chalcogenide glasses , 2005 .

[2]  Blaine A. Bell,et al.  Atomic Line Data , 1995 .

[3]  Andrew G. Glen,et al.  APPL , 2001 .

[4]  Cristian Focsa,et al.  Space- and time-resolved optical diagnosis for the study of laser ablation plasma dynamics , 2009 .

[5]  T. Wágner,et al.  Phase change memory materials–composition, structure, and properties , 2007 .

[6]  Maricel Agop,et al.  Al2O3 ceramics under high-fluence irradiation: plasma plume dynamics through space- and time-resolved optical emission spectroscopy , 2010 .

[7]  Keiji Tanaka,et al.  Chalcogenide glasses in Japan: A review on photoinduced phenomena , 2009 .

[8]  Hansen,et al.  Angular distribution of electron temperature and density in a laser-ablation plume , 2000, Physical review letters.

[9]  David N. Payne,et al.  Gallium lanthanum sulphide optical fibre for active and passive applications , 1996 .

[10]  Heinrich Hora,et al.  Double Layers in Laser Produced Plasmas , 1989 .

[11]  T. Wágner,et al.  Laser desorption ionization time-of-flight mass spectrometric study of binary As-Se glasses. , 2010, Rapid communications in mass spectrometry : RCM.

[12]  E. L. Grove.  Analytical emission spectroscopy , 1971 .

[13]  William G. Graham,et al.  Langmuir probe measurements of plasma parameters in the late stages of a laser ablated plume , 1997 .

[14]  Maricel Agop,et al.  Experimental and Theoretical Aspects of Aluminum Expanding Laser Plasma , 2009 .

[15]  Jasbinder S. Sanghera,et al.  Active and passive chalcogenide glass optical fibers for IR applications: a review , 1999 .

[16]  C. Focsa,et al.  Dynamic space charge structures in high fluence laser ablation plumes , 2006 .

[17]  R. Eason,et al.  A comparative study of gadolinium gallium garnet growth by femtosecond and nanosecond pulsed laser deposition , 2008 .

[18]  Petr Nemec,et al.  Thin chalcogenide films prepared by pulsed laser deposition – new amorphous materials applicable in optoelectronics and chemical sensors , 2006 .

[19]  Kazunobu Tanaka,et al.  Photo-induced metastability in amorphous semiconductors , 1991 .

[20]  Jo,et al.  Angle-resolved energy distributions of laser ablated silver ions in vacuum , 1998 .

[21]  M. Guittard,et al.  Verres du systeme La2S3La2O3Ga2O3Ga2S3 , 1986 .

[22]  M. Agop,et al.  Oscillatory Langmuir probe ion current in laser-produced plasma expansion , 2010 .

[23]  Jørgen Schou,et al.  Physical aspects of the pulsed laser deposition technique: The stoichiometric transfer of material from target to film , 2009 .

[24]  J L Beeby,et al.  Physics of amorphous materials , 1984 .

[25]  Virginie Nazabal,et al.  Laser ablation of AsxSe100−x chalcogenide glasses: Plume investigations , 2009 .

[26]  Robert W. Eason,et al.  Pulsed laser deposition of Ga‐La‐S chalcogenide glass thin film optical waveguides , 1993 .

[27]  Virginie Nazabal,et al.  Sputtering and Pulsed Laser Deposition for Near‐ and Mid‐Infrared Applications: A Comparative Study of Ge25Sb10S65 and Ge25Sb10Se65 Amorphous Thin Films , 2011 .

[28]  S. Elliott,et al.  Optical Nonlinearities in Chalcogenide Glasses and Their Applications , 2007 .

[29]  M. Agop,et al.  Experimental and theoretical investigations of a laser-produced aluminum plasma. , 2008, Physical review. E, Statistical, nonlinear, and soft matter physics.