论文信息 - Wafer-scale SiC rich nano-coating layer by Ar+ and Xe+ ion mixing - 字舞流文

Wafer-scale SiC rich nano-coating layer by Ar+ and Xe+ ion mixing

Z. Zolnai | M. Menyhárd | P. Panjan | G. Battistig | A. Németh | A. Sulyok | S. Gurbán | G. Saf́rań