论文信息 - Off-axis growth of AlN thin films by hollow cathode magnetron sputtering under various nitrogen concentrations - 字舞流文

Off-axis growth of AlN thin films by hollow cathode magnetron sputtering under various nitrogen concentrations

H. Maciel | M. Massi | R. Pessoa | J. S. Marcuzzo | G. Petraconi | K. Grigorov | A. S. S. Sobrinho | G. Murakami | J. Marcuzzo

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