Spacer Removal Technique for Boosting Strain in n-Channel FinFETs With Silicon-Carbon Source and Drain Stressors
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Ming Zhu | Yee-Chia Yeo | Tsung-Yang Liow | N. Balasubramanian | Y. Yeo | G. Samudra | Ming Zhu | N. Balasubramanian | K. Tan | T. Liow | K. Hoe | G.S. Samudra | Kian-Ming Tan | R.T.-P. Lee | R.T.P. Lee | Keat-Mun Hoe
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