Mechanical properties identification and design optimization of nitinol shape memory alloy microactuators

Microactuators are essential elements of MEMS and are widely used in these devices. Microgrippers, micropositioners, microfixtures, micropumps and microvalves are well-known applications of microstructures. In this paper, the design optimization of shape memory alloy microactuators is discussed. Four different configurations of microactuator with variable geometrical parameters, generating different levels of displacement and force, are designed and analysed. In order to determine the optimum values of parameters for each microactuator, statistical design of experiments (DOE) is used. For this purpose, the Souza et?al constitutive model (1988 Eur. J. Mech. A 17 789?806) is adapted for use in finite element analysis software. Mechanical properties of the SMA are identified by performing experimental tests on Ti-49.8%Ni. Finally, the specific energy of each microactuator is determined using the calibrated model and regression analysis. Moreover, the characteristic curve of each microactuator is obtained and with this virtual tool one can choose a microactuator with the desired force and displacement. The methodology discussed in this paper can be used as a reference to design appropriate microactuators for different MEMS applications producing various ranges of displacement and force.

[1]  Alessandro Reali,et al.  A 3-D phenomenological constitutive model for shape memory alloys under multiaxial loadings , 2010 .

[2]  Manfred Kohl,et al.  Linear microactuators based on the shape memory effect , 1998 .

[3]  R. Mehrabi,et al.  3D phenomenological constitutive modeling of shape memory alloys based on microplane theory , 2013 .

[4]  M. A. Northrup,et al.  Thin Film Shape Memory Alloy Microactuators , 1996, Microelectromechanical Systems (MEMS).

[5]  S. H. Lee,et al.  Microactuators Based on Thin Films , 2005 .

[6]  Zhongwei Jiang,et al.  Development of an artificial urethral valve using SMA actuators , 1997 .

[7]  Eiji Nakamachi,et al.  Development of blood extraction pump by shape memory alloy actuator for bio-MEMS , 2006, SPIE Micro + Nano Materials, Devices, and Applications.

[8]  T. Sugawara,et al.  Shape memory thin film actuator for holding a fine blood vessel , 2005, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05..

[9]  Susmita Mishra,et al.  Process optimization of adsorption of Cr(VI) on activated carbons prepared from plant precursors by a two-level full factorial design , 2010 .

[10]  Lorenza Petrini,et al.  Improvements and algorithmical considerations on a recent three‐dimensional model describing stress‐induced solid phase transformations , 2002 .

[11]  Y. Suzuki,et al.  Development of a new type piezoelectric micromotor , 2000 .

[12]  Stephanus Büttgenbach,et al.  Novel micro-pneumatic actuator for MEMS , 2002 .

[13]  Stephanus Büttgenbach,et al.  Batch fabrication of micro grippers with integrated actuators , 2008 .

[14]  Norman A. Fleck,et al.  Three types of planar structure microspring electro-thermal actuators with insulating beam constraints , 2005 .

[15]  Juan G. Santiago,et al.  A review of micropumps , 2004 .

[16]  D. Lagoudas.  Shape memory alloys : modeling and engineering applications , 2008 .

[17]  Thin film NiTi microthermostat array , 2006 .

[18]  T. Saha‐Dasgupta,et al.  Ferroic properties in bi-component perovskites: artificial superlattices and naturally forming compounds , 2014, Journal of physics. Condensed matter : an Institute of Physics journal.

[19]  Alessandro Reali,et al.  On the robustness and efficiency of integration algorithms for a 3D finite strain phenomenological SMA constitutive model , 2011 .

[20]  Henry Helvajian,et al.  Microengineering aerospace systems , 1999 .

[21]  Shuichi Miyazaki,et al.  SMA microgripper with integrated antagonism , 2000 .

[22]  Yves Bellouard,et al.  Shape memory alloys for microsystems: A review from a material research perspective , 2008 .

[23]  Mark J. Anderson,et al.  Mixture DOE uncovers formulations quicker , 2002 .

[24]  D. S. Eddy,et al.  Application of MEMS technology in automotive sensors and actuators , 1998 .

[25]  L. Brinson.  One-Dimensional Constitutive Behavior of Shape Memory Alloys: Thermomechanical Derivation with Non-Constant Material Functions and Redefined Martensite Internal Variable , 1993 .

[26]  Karen Willcox,et al.  Kinetics and kinematics for translational motions in microgravity during parabolic flight. , 2009, Aviation, space, and environmental medicine.

[27]  A. Banerjee,et al.  Simulation of shape memory alloy wire actuator behavior under arbitrary thermo-mechanical loading , 2012 .

[28]  Bruce C. Towe,et al.  A shape memory alloy microvalve with flow sensing , 2006 .

[29]  Ernst Obermeier,et al.  Microactuators and their technologies , 2000 .

[30]  F. Auricchio,et al.  A three‐dimensional model describing stress‐temperature induced solid phase transformations: solution algorithm and boundary value problems , 2004 .

[31]  E. N. Mamiya,et al.  Three-dimensional model for solids undergoing stress-induced phase transformations , 1998 .

[32]  Robert Osiander,et al.  MEMS and Microstructures in Aerospace Applications , 2005 .

[33]  Vladimir Brailovski,et al.  SMA actuators for morphing wings , 2010 .

[34]  Masayoshi Esashi,et al.  Medical and welfare applications of shape memory alloy microcoil actuators , 2005 .

[35]  Jiri Marek.  MEMS for automotive and consumer electronics , 2010, 2010 IEEE International Solid-State Circuits Conference - (ISSCC).