论文信息 - P‐185L: Late‐News Poster: Direct Patterning of Metal Electrodes for TFT‐LCD Fabrication

P‐185L: Late‐News Poster: Direct Patterning of Metal Electrodes for TFT‐LCD Fabrication

We have analyzed a metal direct printing method using roll printing technology for the low cost process in TFT-LCD fabrication. The silver metal electrodes patterned down to 3 μm in space width between lines were directly printed by this method. Very low line resistivity of 4.5 μΩ⋅cm was obtained, which is comparable to that of the AlNd metal alloy for the gate electrode of TFT-LCD. Furthermore, we evaluated the transfer characteristics of an a-Si:H TFT using directly printed silver material as a gate line.

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