Reducing threshold voltage shifts in amorphous silicon thin film transistors by hydrogenating the gate nitride prior to amorphous silicon deposition
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Ya-Hsiang Tai | Huang-Chung Cheng | J. Tsai | F. Luo | H. Tuan | Chun–Yao Huang | F. Su | Y. Tai | Huang-Chung Cheng | Chun‐Yao Huang