Picoamp/nanoamp-level DC current source high-precision calibration system

The invention discloses a picoamp/nanoamp-level DC current source high-precision calibration system, and relates to the technical field of semiconductor device DC characteristic measurement. The picoamp/nanoamp-level DC current source high-precision calibration system comprises a digital multimeter, a high value resistor/ short-circuiting device, a linear regulated power supply and an active calibration adapter. The resistance signal input end of the active calibration adapter is connected with the high value resistor/ short-circuiting device, and the resistance voltage signal output end of the active calibration adapter is connected with the digital multimeter. The power signal input end of the active calibration adapter is connected with the linear regulated power supply. The active calibration adapter is provided with a picoamp/nanoamp-level DC current source current signal input end port. The picoamp/nanoamp-level DC current source high-precision calibration system solves the problems of use limitation (a calibration system is only suitable for micro currents of a protection terminal output) and large measurement errors (voltage of the protection end and voltage of a high value resistor are equal in a default mode, and the protection end output has no linearity in a default mode) in the prior art, and has high market popularization value.