A dual-SPDT RF-MEMS switch on a small-sized LTCC phase shifter for Ku-band operation

Integration of Low Temperature Co-fired Ceramics (LTCC) technology and RF-MEMS is applicable for the realization of a small and cost-effective phase shifter. In this paper, a line-switched-type phase shifter with 3D waveguide structures and a novel design of RF-MEMS switch was demonstrated. The design method and fabrication process were reported with experimental results. The insertion loss and phase error of the 4-bit digital phase shifter on LTCC substrates with the size of 8mm × 8mm × 0.55mm was measured to be around 0.5dB/bit and less than 5% at 12.5GHz, respectively. The Dual Single-Pole-Double-Throw (D-SPDT) MEMS switch showed driving voltage of 40V, insertion loss of 0.9dB, return loss of 12dB and isolation of −29dB at 12.5GHz.

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