论文信息 - Optical properties of Al2O3 and MgF2 coatings deposited by electron-beam evaporation in the DUV/VUV spectral range

Optical properties of Al2O3 and MgF2 coatings deposited by electron-beam evaporation in the DUV/VUV spectral range

Single layers of Al2O3 and MgF2 were deposited upon super polished fused-silica by electron-beam evaporation and were characterized. The subsequent optical constants n and k were reported for the spectral range of 180nm-230nm. And HR coatings for 193nm were designed on the basis of the evaluated optical constants and produced. Transmittance and reflectance of HR coatings were compared to the theoretical calculations on the basis of the evaluated optical constants of the single layers.

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