论文信息 - ALD of Al 2 O 3 for Carbon Nanotube vertical interconnect and its impact on the electrical properties - 字舞流文

ALD of Al 2 O 3 for Carbon Nanotube vertical interconnect and its impact on the electrical properties

O. Richard | H. Bender | M. Heyns | G. Groeseneken | A. Delabie | S. Gendt | P. Vereecken | D. Cott | N. Chiodarelli | Y. Kashiwagi | Sugiura Masahito