Mirrorcle Technologies MEMS Mirrors – Technical Overview

Mirrorcle Technologies Gimbal-less Two-Axis Scanning MEMS Mirror Devices are based on proprietary ARI-MEMS fabrication technology initially developed through research projects at the Adriatic Research Institute (“ARI”) in Berkeley, CA.They provide very fast optical beam steering across two axes, while requiring ultra-low power. The mirrorsdeflect laser beams or images to optical scanning angles of up to 32° on each axis. Compared to the large-scale galvanometer-based optical scanners, these devices require several orders of magnitude less driving power: continuous full-speed operation of the electro-static actuators that drive mirror tip-tilt rotation dissipatesless than 1mW of power.

[1]  D. McCormick,et al.  Gimbal-less monolithic silicon actuators for tip-tilt-piston micromirror applications , 2004, IEEE Journal of Selected Topics in Quantum Electronics.

[2]  V. Milanovic.  Multilevel beam SOI-MEMS fabrication and applications , 2004, Journal of Microelectromechanical Systems.

[3]  V. Milanovic,et al.  Highly adaptable MEMS-based display with wide projection angle , 2007, 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS).

[4]  V. Milanović,et al.  MEMSEye for optical 3D position and orientation measurement , 2011, MOEMS-MEMS.

[5]  Abhishek Kasturi,et al.  High brightness MEMS mirror based head-up display (HUD) modules with wireless data streaming capability , 2015, Photonics West - Optoelectronic Materials and Devices.