Reliable before-fabrication forecasting of expected surface slope distributions for x-ray optics
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[1] J. W. Allen,et al. Evaluation of the autoregression time-series model for analysis of a noisy signal , 1977 .
[2] A model of mechanical polishing in the presence of a lubricant , 2005 .
[3] Valeriy V. Yashchuk,et al. Binary Pseudo-random Grating Standard for Calibration of Surface Profilometers , 2008 .
[4] E. Church. Fractal surface finish. , 1988, Applied optics.
[5] Bore-Kuen Lee,et al. Maximum likelihood parameter estimation of F-ARIMA processes using the genetic algorithm in the frequency domain , 2002, IEEE Trans. Signal Process..
[6] Jiunn-Jong Wu. Simulation of rough surfaces with FFT , 2000 .
[7] P. K. Datta,et al. On the measurement of mtf using periodic patterns of rectangular and triangular wave-forms , 1975 .
[8] Hidekazu Mimura,et al. At-wavelength figure metrology of hard x-ray focusing mirrors , 2006 .
[9] Georg Böhm,et al. Ultra-precision surface finishing by ion beam and plasma jet techniques—status and outlook , 2010 .
[10] K Creath,et al. Calibration of numerical aperture effects in interferometric microscope objectives. , 1989, Applied optics.
[11] Development and Surface Evaluation of Large SiC X-Ray Mirrors for High-Brilliance Synchrotron Radiation , 1994 .
[12] Aydin Kizilkaya,et al. Estimation of 2-D ARMA model parameters by using equivalent AR approach , 2005, J. Frankl. Inst..
[13] Effect of surface roughness on multilayer film growth , 2009 .
[14] Valeriy V. Yashchuk,et al. Cross-check of different techniques for two-dimensional power spectral density measurements of x-ray optics , 2005, SPIE Optics + Photonics.
[15] Kim Lefmann,et al. User and Programmers Guide to the X-Ray-Tracing Package McXtrace, Version 1.0 , 2012 .
[16] K. To̸nder,et al. Simulation of 3-D random rough surface by 2-D digital filter and fourier analysis , 1992 .
[17] Albert T. Macrander,et al. From Flat Substrate to Elliptical KB Mirror by Profile Coating , 2004 .
[18] Y. Mori,et al. Figuring and smoothing capabilities of elastic emission machining for low-thermal-expansion glass optics , 2007 .
[19] E. Levy,et al. Modulation transfer function of a lens measured with a random target method. , 1999, Applied optics.
[20] Glenn D. Boreman,et al. Modulation Transfer Function in Optical and Electro-Optical Systems , 2001 .
[21] Eric M. Gullikson,et al. Development, characterization and experimental performance of x-ray optics for the LCLS free-electron laser , 2008, Optical Engineering + Applications.
[22] Valeriy V. Yashchuk,et al. Air convection noise of pencil-beam interferometer for long trace profiler , 2006, SPIE Optics + Photonics.
[23] Hyug-Gyo Rhee,et al. Discrepancies between roughness measurements obtained with phase-shifting and white-light interferometry. , 2005, Applied optics.
[24] Jui-Chung Hung,et al. A genetic algorithm approach to the spectral estimation of time series with noise and missed observations , 2008, Inf. Sci..
[25] E. Church,et al. Spectral analysis of the finish of polished optical surfaces , 1982 .
[26] Valeriy V. Yashchuk,et al. 21st Century Metrology for Synchrotron Radiation Optics - Understanding How to Specify and Characterize Optics , 2005 .
[27] Augusto Marcelli,et al. Waviness effects in ray-tracing of “real” optical surfaces , 1992 .
[28] Frank Siewert,et al. Finishing procedure for high-performance synchrotron optics , 2004, SPIE Optics + Photonics.
[29] I. Sherrington,et al. Approximate numerical models of 3-d surface topography generated using sparse frequency domain descriptions , 1998 .
[30] Stephan Friedrich,et al. Photon Beamlines and Diagnostics at LCLS , 2011 .
[31] Samuel K. Barber,et al. Binary pseudo-random gratings and arrays for calibration of modulation transfer functions of surface profilometers , 2010 .
[32] Frank Siewert,et al. First report on a European round robin for slope measuring profilers , 2005, SPIE Optics + Photonics.
[33] G. Boreman. Modulation Transfer Function , 1998 .
[34] M. Thomasset,et al. Characterization of optical surfaces for the present generations of synchrotron sources , 2008, International Symposium on Laser Metrology.
[35] Roel Gronheid,et al. Resist roughness evaluation and frequency analysis: metrological challenges and potential solutions for extreme ultraviolet lithography , 2010 .
[36] Alexis Smith-Baumann,et al. Design of an elliptically bent refocus mirror for the MERLIN beamline at the advanced light source , 2007 .
[37] J. Bennett,et al. Calculation of the power spectral density from surface profile data. , 1995, Applied optics.
[38] Frank Siewert,et al. The Nanometer Optical Component Measuring Machine , 2008 .
[39] Samuel K. Barber,et al. Development of pseudo-random binary gratings and arrays for calibration of surface profile metrology tools , 2009 .
[40] Valeriy V. Yashchuk,et al. Optimal tuning and calibration of bendable mirrors with slope-measuring profilers , 2009 .
[41] Valeriy V. Yashchuk,et al. Binary pseudo-random grating as a standard test surface for measurement of modulation transfer function of interferometric microscopes , 2007, SPIE Optical Engineering + Applications.
[42] Guangjun Gao,et al. Measuring the phase transfer function of a phase-shifting interferometer , 2008, Optical Engineering + Applications.
[43] Frank Siewert,et al. Fabrication of X-ray mirrors for synchrotron applications , 2010 .
[44] J. Zavada,et al. Relationship between surface scattering and microtopographic features (A) , 1979 .
[45] T. Warwick,et al. Surface roughness of stainless-steel mirrors for focusing soft x rays. , 2006, Applied optics.
[46] S. Wu,et al. Mathematical model of a ground surface profile with the grinding process as a feedback system , 1976 .
[47] Richard Barakat. Determination of the Optical Transfer Function Directly from the Edge Spread Function , 1965 .
[48] Benoit B. Mandelbrot,et al. Fractal Geometry of Nature , 1984 .
[49] Xinjian Gu,et al. The modelling and simulation of a rough surface , 1990 .
[50] Samuel K. Barber,et al. Calibration of the modulation transfer function of surface profilometers with binary pseudorandom test standards: expanding the application range to Fizeau interferometers and electron microscopes , 2011 .
[51] Berge Tatian. Method for Obtaining the Transfer Function from the Edge Response Function , 1965 .
[52] Antoine Llebaria,et al. Autoregressive process for characterizing statistically rough surfaces , 1993 .
[53] Richard Celestre,et al. Development of in situ, at-wavelength metrology for soft X-ray nano-focusing , 2010 .
[54] Y. Mori,et al. Figuring with subnanometer-level accuracy by numerically controlled elastic emission machining , 2002 .
[55] Andreas K. Freund,et al. Incoherent x-ray mirror surface metrology , 1997, Optics & Photonics.
[56] T. Zeschke,et al. The Nanometer Optical Component Measuring Machine: a new Sub-nm Topography Measuring Device for X-ray Optics at BESSY , 2004 .
[57] Hsiao-Chun Wu,et al. Novel Fast Computation Algorithm of the Second-Order Statistics for Autoregressive Moving-Average Processes , 2009, IEEE Trans. Signal Process..
[58] Samuel K. Barber,et al. Sub-microradian surface slope metrology with the ALS Developmental Long Trace Profiler , 2009 .
[59] Xavier Levecq,et al. Hartmann and Shack–Hartmann Wavefront Sensors for Sub-nanometric Metrology , 2008 .
[60] Erkin Sidick,et al. Power spectral density specification and analysis of large optical surfaces , 2009, Optical Metrology.
[61] Guangjun Gao,et al. Spatially resolved height response of phase-shifting interferometers measured using a patterned mirror with varying spatial frequency , 2010 .
[62] Frank Siewert,et al. Upgrade of long trace profiler for characterization of high-precision X-ray mirrors at SPring-8 , 2010 .
[63] E L Church,et al. Specification of surface figure and finish in terms of system performance. , 1993, Applied optics.
[64] F. Schäfers. The BESSY Raytrace Program RAY , 2008 .
[65] Hidekazu Mimura,et al. Wave-optical analysis of submicron focus of hard x-ray beams by reflective optics , 2002, SPIE Optics + Photonics.
[66] T. Ishikawa,et al. Relative angle determinable stitching interferometry for hard x-ray reflective optics , 2005 .
[67] Valeriy V Yashchuk,et al. Optimal measurement strategies for effective suppression of drift errors. , 2009, The Review of scientific instruments.
[68] Kenneth A. Goldberg,et al. Extreme ultraviolet alignment and testing of a four-mirror ring field extreme ultraviolet optical system , 2000 .
[69] Frank Siewert,et al. The Diamond-NOM: A non-contact profiler capable of characterizing optical figure error with sub-nanometre repeatability , 2010 .
[70] Frank Siewert,et al. Advanced metrology: an essential support for the surface finishing of high performance x-ray optics , 2005, SPIE Optics + Photonics.
[71] Piet M. T. Broersen,et al. Generating data with prescribed power spectral density , 2003, IEEE Trans. Instrum. Meas..
[72] Jeffrey M. Wooldridge,et al. Introductory Econometrics: A Modern Approach , 1999 .
[73] Mourad Idir,et al. Modern developments in X-ray and neutron optics , 2008 .
[74] Peter Z. Takacs,et al. Step-height standard for surface-profiler calibration , 1993, Optics & Photonics.
[75] Samuel K. Barber,et al. Development of pseudorandom binary arrays for calibration of surface profile metrology tools , 2009 .
[76] Steven Kay,et al. Modern Spectral Estimation: Theory and Application , 1988 .
[77] I. Fukumoto,et al. Improvement of ground surface roughness in Al-Si alloys , 1990 .
[78] Manuel Sanchez del Rio,et al. SHADOW3: a new version of the synchrotron X-ray optics modelling package , 2011, Journal of synchrotron radiation.
[79] E. Friot,et al. Fast synthesis of arma models for the recursive simulation of a scalar random process with a given target spectrum , 1994 .
[80] Kenneth A. Goldberg,et al. Extreme ultraviolet carrier-frequency shearing interferometry of a lithographic four-mirror optical system , 2000 .
[81] Gregory Y. Morrison,et al. Performance of the upgraded LTP-II at the ALS Optical Metrology Laboratory , 2008, Optical Engineering + Applications.
[82] François Polack,et al. An LTP stitching procedure with compensation of instrument errors: Comparison of SOLEIL and ESRF results on strongly curved mirrors , 2010 .
[83] Wayne R. McKinney,et al. 2D SPATIAL FREQUENCY CONSIDERATIONS IN COMPARING 1D POWER SPECTRAL DENSITY:MEASUREMENTS* , 2010 .
[84] Malcolm R. Howells,et al. Future metrology needs for synchrotron radiation grazing-incidence optics , 2000 .
[85] Valeriy V. Yashchuk,et al. Two-dimensional power spectral density measurements of x-ray optics with the Micromap interferometric microscope , 2005, SPIE Optical Metrology.
[86] Hidekazu Mimura,et al. Requirements on hard x-ray grazing incidence optics for European XFEL: analysis and simulation of wavefront transformations , 2009, Optics + Optoelectronics.
[87] Ralf D. Geckeler,et al. Sub-nm topography measurement by deflectometry: flatness standard and wafer nanotopography , 2002, SPIE Optics + Photonics.
[88] D. Attwood. Soft X-Rays and Extreme Ultraviolet Radiation , 1999 .
[89] Eugene L. Church,et al. Specification of glancing- and normal-incidence x-ray mirrors [also Erratum 34(11)3348(Nov1995)] , 1995 .
[90] Hidekazu Mimura,et al. Stitching-angle measurable microscopic-interferometer: Surface-figure metrology tool for hard X-ray nanofocusing mirrors with large curvature , 2010 .
[91] Ralf D. Geckeler. ESAD shearing deflectometry: potentials for synchrotron beamline metrology , 2006, SPIE Optics + Photonics.
[92] Jana Buchheim,et al. Characterization and calibration of 2nd generation slope measuring profiler , 2010 .
[93] Kenichi Hibino,et al. Measurement of air turbulence for on-machine interferometry. , 2003, Applied optics.