Dense arrays of ordered GaAs nanostructures by selective area growth on substrates patterned by block copolymer lithography

GaAs has been selectively grown in a hexagonally ordered array of nanometer-scale holes with a density as high as ∼1011/cm2 by metalorganic chemical vapor deposition. This array of holes was created using block copolymer lithography, in which a thin layer of diblock copolymer was used as an etching mask to make dense holes in a 15-nm-thick SiNx film. These selectively grown nanoscale features are estimated to be 23 nm in diameter with narrow lateral size and height distributions as characterized by field-emission scanning electron microscopy and tapping mode atomic force microscopy. The narrow size distribution and uniform spatial position of the nanoscale dots we report offer potential advantages over self-assembled dots grown by the Stranski–Krastanow mode.

[1]  Dieter Bimberg,et al.  Room-temperature continuous-wave lasing from stacked InAs/GaAs quantum dots grown by metalorganic chemical vapor deposition , 1997 .

[2]  G. Solomon Electronic coupling and structural ordering of quantum dots using InAs quantum dot columns , 1999 .

[3]  Christopher Harrison,et al.  Lithography with a mask of block copolymer microstructures , 1998 .

[4]  L. Fetters,et al.  Anionic Polymerization of Vinyl Monomers , 1975 .

[5]  Eaglesham,et al.  Dislocation-free Stranski-Krastanow growth of Ge on Si(100). , 1990, Physical review letters.

[6]  Kobayashi,et al.  Vertically self-organized InAs quantum box islands on GaAs(100). , 1995, Physical review letters.

[7]  Eiichi Kuramochi,et al.  Spatial ordering of self-organized InGaAs/AlGaAs quantum disks on GaAs (311)B substrates , 1999 .

[8]  Christopher Harrison,et al.  Block copolymer lithography: Periodic arrays of ~1011 holes in 1 square centimeter , 1997 .

[9]  Tomonori Ishikawa,et al.  Site control of self-organized InAs dots on GaAs substrates by in situ electron-beam lithography and molecular-beam epitaxy , 1998 .

[10]  G. Fredrickson,et al.  Block copolymer thermodynamics: theory and experiment. , 1990, Annual review of physical chemistry.

[11]  Z. G. Wang,et al.  Photoluminescence study on coarsening of self-assembled InAlAs quantum dots on GaAs (001) , 1999 .

[12]  M. Ishii,et al.  Stacking number dependence of size distribution of vertically stacked InAs/GaAs quantum dots , 1999 .

[13]  D. Deppe,et al.  1.3 μm room-temperature GaAs-based quantum-dot laser , 1998 .