Interferometric measurements of electric field-induced displacements in piezoelectric thin films

Interferometric measurements of electric field‐induced displacements in piezoelectric thin films using single‐beam and double‐beam optical detection schemes are reported. It is shown that vibrational response measured with a single‐beam interferometer includes a large contribution of the bending motion of substrate. Therefore, it is difficult to apply single‐beam technique for piezoelectric measurements in thin films. To suppress the bending effect a high‐resolution double‐beam interferometer is proposed. The sensitivity of the interferometer is significantly improved in comparison with previously reported system. The interferometer is shown to resolve small displacements without using a lock‐in technique. An example of the interferometric capabilities is demonstrated with experimental results on electric field, frequency, and time dependences of piezoelectric response for quartz and Pb(Zr,Ti)O3 thin film.

[1]  D. Viehland,et al.  Frequency-dependent electromechanical properties for sol-gel deposited ferroelectric lead zirconate titanate thin layers: Thickness and processing effects , 1995 .

[2]  James B. Spicer,et al.  Theoretical noise-limited sensitivity of classical interferometry , 1987 .

[3]  L. E. Cross,et al.  High-frequency strain response in ferroelectrics and its measurement using a modified Mach-Zehnder interferometer , 1989 .

[4]  P. G. Harper,et al.  The piezoelectric bimorph: An experimental and theoretical study of its quasistatic response , 1978 .

[5]  N. Setter,et al.  PZT films for micro-pumps , 1995 .

[6]  Dennis L. Polla,et al.  Applications of PZT and Related Thin Films in Piezoelectric Microsensors , 1991 .

[7]  J. Cuomo,et al.  Electrical and Mechanical Properties of PZT Films , 1990 .

[8]  T. Maeder,et al.  Properties of Piezoelectric Pzt Thin Films for Microactuator Applications , 1994 .

[9]  G. Dormans,et al.  Measurement of piezoelectric coefficients of ferroelectric thin films , 1994 .

[10]  L. E. Cross,et al.  Laser interferometer for the study of piezoelectric and electrostrictive strains , 1988 .

[11]  Noise limitations of Michelson laser interferometers , 1980 .

[12]  R.M. White,et al.  Integrated multisensor chip , 1986, IEEE Electron Device Letters.

[13]  Robert L. Forward,et al.  Wideband laser-interferometer gravitational-radiation experiment , 1978 .

[14]  D. Viehland,et al.  Piezoelectric properties of sol‐gel‐derived ferroelectric and antiferroelectric thin layers , 1994 .

[15]  Paul Muralt,et al.  Fabrication and characterization of PZT thin-film vibrators for micromotors , 1995 .

[16]  D. Polla,et al.  Integrated ferroelectric microelectromechanical systems (MEMS) , 1995 .

[17]  T. Kwaaitaal.  Contribution to the interferometric measurement of sub‐angstrom vibrations , 1974 .

[18]  Leslie E. Cross,et al.  A sensitive double beam laser interferometer for studying high-frequency piezoelectric and electrostrictive strains , 1989 .

[19]  D. Viehland,et al.  Simple, high‐resolution interferometer for the measurement of frequency‐dependent complex piezoelectric responses in ferroelectric ceramics , 1995 .

[20]  Richard M. White,et al.  A multisensor employing an ultrasonic Lamb-wave oscillator , 1988 .

[21]  T. Maeder,et al.  Interferometric study of piezoelectric degradation in ferroelectric thin films , 1995 .

[22]  Virgil E. Bottom.  Fabry‐Perot Dilatometer , 1964 .