A Combined Mechanical and Electrical Characterization Procedure for Investigating the Dynamic Behavior of RF-MEMS Switches

This paper shows the potentialities of two characterization procedures on the electrical and mechanical characterizations of ohmic RF microelectromechanical systems (MEMS) switches. The first is a “fast electrical” procedure that uses an electrical stimulus and monitors the RF signals at the input and output ports of the switch; the second is a “fast hybrid” procedure, i.e., electrical and mechanical, with an electrical input adopted to actuate the device and a mechanical measurement conducted with an optical profilometer, which monitors the displacement and the velocity of the moving membrane when the input electrical signal is applied. Both systems are validated on cantilever and clamped-clamped resistive RF-MEMS switches. We developed these measurement procedures to speed up the measurement process and, consequently, to limit charge trapping during the characterization process. In future analyses, the procedure will be systematically applied to investigate reliability issues when the switch is subjected to multiple impacts and long-term actuation. The use of such procedures will permit separating electrical and mechanical failure mechanisms.

[1]  J.L. Ebel,et al.  RF MEMS Testing - Beyond the S-Parameters , 2007, IEEE Microwave Magazine.

[2]  Aurelio Soma,et al.  Dynamic identification of electrostatically actuated MEMS in the frequency domain , 2010 .

[3]  R. Gaddi,et al.  Reliability Issues in RF-MEMS Switches Submitted to Cycling and ESD Test , 2006, 2006 IEEE International Reliability Physics Symposium Proceedings.

[4]  S. Eshelman,et al.  Performance of low-loss RF MEMS capacitive switches , 1998 .

[5]  D. Molinero,et al.  Long-term RF Burn-in Effects on Dielectric Charging of MEMS Capacitive Switches , 2013, IEEE Transactions on Device and Materials Reliability.

[6]  Lianjun Liu.  High Performance RF MEMS Series Contact Switch - Design and Simulations , 2007, 2007 Proceedings 57th Electronic Components and Technology Conference.

[7]  J.C.M. Hwang,et al.  Temperature Acceleration of Dielectric Charging in RF MEMS Capacitive Switches , 2006, 2006 IEEE MTT-S International Microwave Symposium Digest.

[8]  W. De Raedt,et al.  Analytical Model of the DC Actuation of Electrostatic MEMS Devices With Distributed Dielectric Charging and Nonplanar Electrodes , 2007, Journal of Microelectromechanical Systems.

[9]  Patrick Pons,et al.  Structure dependent charging process in RF MEMS capacitive switches , 2007, Microelectron. Reliab..

[10]  J. Iannacci,et al.  A general purpose reconfigurable MEMS-based attenuator for Radio Frequency and microwave applications , 2009, IEEE EUROCON 2009.

[11]  G. De Pasquale,et al.  MEMS Mechanical Fatigue: Experimental Results on Gold Microbeams , 2009, Journal of Microelectromechanical Systems.

[12]  G.J. Papaioannou,et al.  RF MEMS sensitivity to radiations , 2004, 34th European Microwave Conference, 2004..

[13]  Eugenio Brusa,et al.  Experimental Characterization of Electro–Thermo–Mechanical Coupling in Gold RF Microswitches , 2013, Journal of Microelectromechanical Systems.

[14]  J. Iannacci,et al.  Evolution of electrical parameters of dielectric-less ohmic RF-MEMS switches during continuous actuation stress , 2009, 2009 Proceedings of the European Solid State Device Research Conference.

[15]  Gaudenzio Meneghesso,et al.  Study of the actuation speed, bounces occurrences, and contact reliability of ohmic RF-MEMS switches , 2010, Microelectron. Reliab..

[16]  Gabriel M. Rebeiz,et al.  RF MEMS switches and switch circuits , 2001 .

[17]  L. Katehi,et al.  Impact of Mechanical Vibration on the Performance of RF MEMS Evanescent-Mode Tunable Resonators , 2011, IEEE Microwave and Wireless Components Letters.

[18]  C. Goldsmith,et al.  High-Cycle Life Testing of RF MEMS Switches , 2007, 2007 IEEE/MTT-S International Microwave Symposium.

[19]  Investigating the Performance of RF MEMS Switches , 2006, 2006 IEEE International Conference on Semiconductor Electronics.

[20]  P. Steeneken,et al.  Fast RF-CV characterization through high-speed 1-port S-parameter measurements , 2012, 2010 International Conference on Microelectronic Test Structures (ICMTS).

[21]  G.G. Adams,et al.  Modeling and Measurement of the Dynamic Performance of an OHMIC Contact-Type RF MEMS Switch , 2007, TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference.

[22]  A. Crunteanu,et al.  Charging in Dielectricless Capacitive RF-MEMS Switches , 2009, IEEE Transactions on Microwave Theory and Techniques.

[23]  B. Reig,et al.  Key improvements of the MEMS switch lifetime thanks to a dielectric-free design and contact reliability investigations in hot/cold switching operations , 2013, 2013 IEEE International Reliability Physics Symposium (IRPS).

[24]  R. Sorrentino,et al.  Design Manufacturing and Packaging of a 5-bit K-Band MEMS Phase Shifter , 2008, 2008 European Microwave Integrated Circuit Conference.

[25]  Kevin Barraclough,et al.  I and i , 2001, BMJ : British Medical Journal.

[26]  P. Nicolosi,et al.  Accelerated testing of RF-MEMS contact degradation through radiation sources , 2010, 2010 IEEE International Reliability Physics Symposium.

[27]  G. De Pasquale,et al.  MEMS Mechanical Fatigue: Effect of Mean Stress on Gold Microbeams , 2011, Journal of Microelectromechanical Systems.

[28]  R. Plana,et al.  Investigation of Stiction Effect in Electrostatic Actuated RF MEMS Devices , 2007, 2007 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems.

[29]  Giorgio De Pasquale,et al.  Reliability improvement in microstructures by reducing the impact velocity through electrostatic force modulation , 2012, Microelectron. Reliab..

[30]  W. De Raedt,et al.  Distributed dielectric charging and its impact on RF MEMS devices , 2004, 34th European Microwave Conference, 2004..

[31]  Robert Puers,et al.  Dynamics and squeeze film gas damping of a capacitive RF MEMS switch , 2005 .