MEMS devices for the future wireless applications

In this communication, we will outline the potentialities offered by the MEMS technologies to realize front end modules featuring attractive performances in term of noise, linearity, power consumption and compactness. Bulk micromachining techniques are used to achieve very low loss interconnects up to millimeterwave range when surface micromachining techniques are preferred to realize moveable devices. The association of bulk and surface micromachining allows to realize advanced millimeterwave microsystems. Concerning the design methods, both electromagnetic, electrical and mechanical simulation are mandatory to get accurate results.

[1]  P. Blondy,et al.  An electromechanical model for MEMS switches , 2001, 2001 IEEE MTT-S International Microwave Sympsoium Digest (Cat. No.01CH37157).

[2]  B. Pillans,et al.  Lifetime characterization of capacitive RF MEMS switches , 2001, 2001 IEEE MTT-S International Microwave Sympsoium Digest (Cat. No.01CH37157).

[3]  M. F. Chang,et al.  A Surface Micromachined Miniature Switch For Telecommunications Applications With Signal Frequencies From DC Up To 4 Ghz , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

[4]  G.M. Rebeiz,et al.  2 and 4-bit DC-18 GHz microstrip MEMS distributed phase shifters , 2001, 2001 IEEE MTT-S International Microwave Sympsoium Digest (Cat. No.01CH37157).

[5]  J. Graffeuil,et al.  Design and realization of high Q millimeter-wave structures through micromachining techniques , 1999, 1999 IEEE MTT-S International Microwave Symposium Digest (Cat. No.99CH36282).

[6]  Gabriel M. Rebeiz,et al.  30 GHz tuned MEMS switches , 1999, 1999 IEEE MTT-S International Microwave Symposium Digest (Cat. No.99CH36282).

[7]  Gabriel M. Rebeiz,et al.  High-isolation CPW MEMS shunt switches. 2. Design , 2000 .

[8]  Gabriel M. Rebeiz,et al.  High-isolation CPW MEMS shunt switches. 1. Modeling , 2000 .

[9]  E. M. Jones,et al.  Microwave Filters, Impedance-Matching Networks, and Coupling Structures , 1980 .

[10]  C. Goldsmith,et al.  Micromechanical membrane switches for microwave applications , 1995, Proceedings of 1995 IEEE MTT-S International Microwave Symposium.

[11]  Chang Liu,et al.  Development of vertical planar coil inductors using plastic deformation magnetic assembly (PDMA) , 2001, 2001 IEEE MTT-S International Microwave Sympsoium Digest (Cat. No.01CH37157).

[12]  Dominique Cros,et al.  Whispering gallery dielectric resonator modes for W-band devices , 1990 .

[13]  Patrick Pons,et al.  A dedicated micromachining technology for high-aspect-ratio millimetre-wave circuits , 1998 .

[14]  George E. Ponchak,et al.  RF Transmission Lines on Silicon Substrates , 1999, 1999 29th European Microwave Conference.

[15]  J. Papapolymerou,et al.  A reconfigurable double-stub tuner using MEMS devices , 2001, 2001 IEEE MTT-S International Microwave Sympsoium Digest (Cat. No.01CH37157).

[16]  Bonkee Kim,et al.  Monolithic planar RF inductor and waveguide structures on silicon with performance comparable to those in GaAs MMIC , 1995, Proceedings of International Electron Devices Meeting.

[17]  W.Y. Liu,et al.  Membrane-supported copper E-plane circuits , 2001, 2001 IEEE MTT-S International Microwave Sympsoium Digest (Cat. No.01CH37157).

[18]  J.U. Bu,et al.  Micromachined RF MEMS tunable capacitors using piezoelectric actuators , 2001, 2001 IEEE MTT-S International Microwave Sympsoium Digest (Cat. No.01CH37157).

[19]  K. Petersen.  Micromechanical membrane switches on silicon , 1979 .

[20]  Elliott R. Brown,et al.  RF-MEMS switches for reconfigurable integrated circuits , 1998 .

[21]  Gabriel M. Rebeiz,et al.  Study of a novel planar transmission line , 1991, 1991 IEEE MTT-S International Microwave Symposium Digest.

[22]  Mona E. Zaghloul,et al.  Micromachined microwave transmission lines in CMOS technology , 1997 .

[23]  Mona E. Zaghloul,et al.  High Q backside micromachined CMOS inductors , 1999, ISCAS'99. Proceedings of the 1999 IEEE International Symposium on Circuits and Systems VLSI (Cat. No.99CH36349).

[24]  M. Feng,et al.  Low actuation voltage RF MEMS switches with signal frequencies from 0.25 GHz to 40 GHz , 1999, International Electron Devices Meeting 1999. Technical Digest (Cat. No.99CH36318).

[25]  S. Eshelman,et al.  Characteristics of micromachined switches at microwave frequencies , 1996, 1996 IEEE MTT-S International Microwave Symposium Digest.

[26]  L.E. Larson.  Microwave MEMS technology for next-generation wireless communications , 1999, 1999 IEEE MTT-S International Microwave Symposium Digest (Cat. No.99CH36282).

[27]  J.-G. Yook,et al.  A novel CPW structure for high-speed interconnects , 2001, 2001 IEEE MTT-S International Microwave Sympsoium Digest (Cat. No.01CH37157).

[28]  E. Yeatman,et al.  MEMS high Q microwave inductors using solder surface tension self-assembly , 2001, 2001 IEEE MTT-S International Microwave Sympsoium Digest (Cat. No.01CH37157).

[29]  John N. Randall,et al.  Fabrication of micromechanical switches for routing radio frequency signals , 1996 .

[30]  S. Eshelman,et al.  Micromachined low-loss microwave switches , 1999 .

[31]  Lawrence E. Larson,et al.  Micromachined microwave actuator (MIMAC) technology-a new tuning approach for microwave integrated circuits , 1991, IEEE 1991 Microwave and Millimeter-Wave Monolithic Circuits Symposium. Digest of Papers.