Photoresponse enhancement of plasmonic terahertz wave detector based on asymmetric silicon MOSFETs with antenna integration

We report the experiments of a plasmonic terahertz (THz) wave detector based on silicon (Si) field-effect transistors (FETs) in the nonresonant sub-THz (0.2 THz) regime. To investigate the effects of the overdamped charge asymmetry on responsivity (RV), a FET structure with the asymmetric source and drain area under the gate has been proposed. RV as a function of gate voltage in Si FET-based detectors integrated with an antenna has been successfully enhanced by the asymmetry ratio (ηa = WD/WS) of gate-overlapped drain width (WD) to source width (WS) in agreement with the nonresonant quasi-plasma wave detection theory. The experimentally measured photoresponse has been enhanced by about 36.2 times on average from various samples according to the 10-fold increase in ηa. The effect of the integrated bow-tie antenna on the performance enhancement has also been estimated as 60-fold at the maximum incident angle for the polarized THz wave source.

[1]  Alvydas Lisauskas,et al.  A 0.65 THz Focal-Plane Array in a Quarter-Micron CMOS Process Technology , 2009, IEEE Journal of Solid-State Circuits.

[2]  H. Roskos,et al.  Rational design of high-responsivity detectors of terahertz radiation based on distributed self-mixing in silicon field-effect transistors , 2009 .

[3]  J. Liaw.  Analysis of a Bowtie Nanoantenna for the Enhancement of Spontaneous Emission , 2008, IEEE Journal of Selected Topics in Quantum Electronics.

[4]  Michael S. Shur,et al.  Terahertz detection by high-electron-mobility transistor: Enhancement by drain bias , 2001 .

[5]  W. Knap,et al.  Plasmonic terahertz detection by a double-grating-gate field-effect transistor structure with an asymmetric unit cell , 2011 .

[6]  Shur,et al.  Shallow water analogy for a ballistic field effect transistor: New mechanism of plasma wave generation by dc current. , 1993, Physical review letters.

[7]  Laurent Dussopt,et al.  Broadband terahertz imaging with highly sensitive silicon CMOS detectors. , 2011, Optics express.

[8]  M. Shur,et al.  Detection, mixing, and frequency multiplication of terahertz radiation by two-dimensional electronic fluid , 1996 .

[9]  Richard J. Temkin,et al.  Active real-time imaging system employed with a CW 460-GHz gyrotron and a pyroelectric array camera , 2009, 2009 34th International Conference on Infrared, Millimeter, and Terahertz Waves.

[10]  M. Shur,et al.  Nonresonant Detection of Terahertz Radiation in Field Effect Transistors , 2002 .

[11]  Seong-Tae Han,et al.  Design and Characterization of Plasmonic Terahertz Wave Detectors Based on Silicon Field-Effect Transistors , 2012 .

[12]  C. Gaquiere,et al.  Terahertz imaging using high electron mobility transistors as plasma wave detectors , 2009 .

[13]  Michihiko Suhara,et al.  Equivalent Circuit Model of Triple-Barrier Resonant Tunneling Diodes Monolithically Integrated with Bow-Tie Antennas and Analysis of Rectification Properties towards Ultra Wideband Terahertz Detections , 2011 .

[14]  Mikhail I. Dyakonov,et al.  Field Effect Transistors for Terahertz Detection: Physics and First Imaging Applications , 2009, 0907.2523.

[15]  Michael S. Shur,et al.  Plasma wave detection of sub-terahertz and terahertz radiation by silicon field-effect transistors , 2004 .

[16]  M. Shur,et al.  Plasma wave detection of terahertz radiation by silicon field effects transistors: Responsivity and noise equivalent power , 2006 .

[17]  T. Nagatsuma,et al.  Polarization and frequency studies of Si MOSFET terahertz detectors , 2012, International Conference on Infrared, Millimeter, and Terahertz Waves.

[18]  A. Shchepetov,et al.  Resonant and voltage-tunable terahertz detection in InGaAs /InP nanometer transistors , 2006 .

[19]  Sung-Ho Kim,et al.  Plasmonic Terahertz Wave Detectors Based on Silicon Field-Effect Transistors , 2013, IEICE Trans. Electron..

[20]  N. Dyakonova,et al.  Oblique modes effect on terahertz plasma wave resonant detection in InGaAs∕InAlAs multichannel transistors , 2008 .

[21]  Gintaras Valušis,et al.  Current driven resonant plasma wave detection of terahertz radiation: Toward the Dyakonov–Shur instability , 2008 .