White light phase-stepping interferometry based on insensitive algorithm to periodic systematic error

Periodic systematic error caused by erroneous reference phase adjustments and instabilities of interferometer has a great influence on precision of measurement micro-profile using white light phase-stepping interferometry. This paper presents a five-frame algorithm that is insensitive to periodic systematic error. This algorithm attempts to eliminate the periodic systematic error when calculating the phase. Both theoretical and experimental results show that the proposed algorithm has good immunity to periodic systematic error and is able to accurately recover the 3D profile of a sample.

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