论文信息 - Black layer coatings for the photolithographic manufacture of diffraction gratings. - 字舞流文

Black layer coatings for the photolithographic manufacture of diffraction gratings.

A black layer coating for an aluminum-photoresist interface with a reflectance less than 0.1% for 413-nm, s-polarized light incident at 25 degrees is described. It is made of space-compatible materials, and its rms roughness is less than 15 A.

Daniel Poitras | J A Dobrowolski | Clive Midwinter | C Thomas McElroy | Tom Cassidy

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