论文信息 - Conformal grating electromechanical system (GEMS) for high-speed digital light modulation

Conformal grating electromechanical system (GEMS) for high-speed digital light modulation

A diffractive optical MEMS device for spatial and temporal light modulation is described that is capable of high-speed digital operation. The device contains electromechanical ribbons suspended flat above a silicon substrate by a periodic series of intermediate supports. When actuated electrostatically, the ribbons conform around the support substructure to produce a grating. The device has optical switching times of less than 50 nsec, sub-nanosecond jitter, high optical contrast and efficiency, and reliable actuation in contact mode. The fine gray levels needed for digital imaging systems are produced by pulse width modulation.

[1] N. Sheridon,et al. The Ruticon family of erasable image recording devices , 1972 .

[2] Miss A.O. Penney. (b) , 1974, The New Yale Book of Quotations.

[3] M. E. Cox. Handbook of Optics , 1980 .

[4] D. Poitras,et al. Metallized viscoelastic control layers for light-valve projection displays , 1995 .

[5] O. Solgaard,et al. Deformable grating optical modulator. , 1992, Optics letters.

[6] S. Senturia,et al. M-TEST: A test chip for MEMS material property measurement using electrostatically actuated test structures , 1997 .

[7] Robert W. Corrigan,et al. Optical performance of the Grating Light Valve technology , 1999, Electronic Imaging.