Conformal grating electromechanical system (GEMS) for high-speed digital light modulation

A diffractive optical MEMS device for spatial and temporal light modulation is described that is capable of high-speed digital operation. The device contains electromechanical ribbons suspended flat above a silicon substrate by a periodic series of intermediate supports. When actuated electrostatically, the ribbons conform around the support substructure to produce a grating. The device has optical switching times of less than 50 nsec, sub-nanosecond jitter, high optical contrast and efficiency, and reliable actuation in contact mode. The fine gray levels needed for digital imaging systems are produced by pulse width modulation.