The influence of high-energy ion bombardment on chemical structures of non-metallic materials was investigated to clarify the mechanism of the material degradation in space. Polymers of polyimide, polyetherether-ketone and perfluoroalkoxy and glasses coated with MgF2 were exposed to ion beams of oxygen and nitrogen with energy levels of 600eV-5keV, which were generated using an electron cyclotron resonance discharge ion accelerator. For the polymers, X-ray photoelectron spectroscopic analysis showed that both addition reactions of oxygen or nitrogen atoms and separations of various structural compounds occurred. In the glass plate, the coating layer of MgF2 was sputtered drastically.