Selected-area Deposition Of Multiple Active Films For Conductometric Microsensor Arrays
暂无分享,去创建一个
John S. Suehle | P. Chaparala | Richard E. Cavicchi | Stephen Semancik | Kenneth G. Kreider | R. Cavicchi | S. Semancik | P. Chaparala | K. Kreider | J. Suehle
[1] M. Gaitan,et al. Tin oxide gas sensor fabricated using CMOS micro-hotplates and in-situ processing , 1993, IEEE Electron Device Letters.
[2] Richard E. Cavicchi,et al. Particle growth of palladium on epitaxial tin oxide thin films , 1994 .
[3] John A. Small,et al. Growth of SnO2 films on micromachined hotplates , 1995 .