论文信息 - Film‐edge‐induced stress in substrates

Film‐edge‐induced stress in substrates

The problem of film‐edge‐induced stress in substrates has been analyzed self‐consistently by allowing a distributed force in the film. The distributed force arises from the relaxation of the film strain, which is complementarily coupled to the substrate strain under the film force. The results are compared to those from a concentrated‐edge‐force approximation.

S. M. Hu | S. Hu

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