Surface form metrology of micro-optics

This keynote starts from an overview of micro-optics from fundamental functions, fabrication methods and applications in precision engineering and nanotechnology. State-of-the-art measuring systems for surface form metrology of microoptics with micro-structured surfaces, including diffractive micro-optics such as diffraction gratings and refractive micro-optics such as micro lenses and micro-lens arrays, are then be presented. The measuring systems introduced in the presentation are classified into scanning probe microscope-based systems, mechanical stylus profiling systems and optical evaluation systems. Related research activities carried out in the authors' group are also highlighted.

[1]  M. Hartmann,et al.  Replication of micro-optical components and nano-structures for mass production , 2008, SPIE Photonics Europe.

[2]  Guo-Dung John Su,et al.  Design and fabrication of long focal length microlens arrays , 2011, 2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems.

[3]  Nestor O. Farmiga,et al.  Optical measurement of depth and duty cycle for binary diffraction gratings with subwavelength features. , 2003, Applied optics.

[4]  Takashi Sato.  Talbot effect immersion lithography by self-imaging of very fine grating patterns , 2012 .

[5]  Kuang-Chao Fan,et al.  Development of a low-cost autofocusing probe for profile measurement , 2001 .

[6]  Masayoshi Esashi,et al.  Fabrication of three-dimensional microstructure using maskless gray-scale lithography , 2006 .

[7]  Lijiang Zeng,et al.  A sub-nanometric three-axis surface encoder with short-period planar gratings for stage motion measurement , 2012 .

[8]  Hiroshi Fujimoto,et al.  High-Speed Atomic Force Microscope by Surface Topography Observer , 2012 .

[9]  J. McNeil,et al.  Ellipsometric Scatterometry for the Metrology of Sub-0.1- num-Linewidth Structures. , 1998, Applied optics.

[10]  Wei Gao,et al.  Fabrication of diffraction gratings for surface encoders by using a Lloyd’s mirror interferometer with a 405 nm laser diode , 2013, Other Conferences.

[11]  Theodore V. Vorburger,et al.  Industrial uses of STM and AFM , 1999 .

[12]  Agostino G. Bruzzone,et al.  Advances in engineered surfaces for functional performance , 2008 .

[13]  P. Flournoy,et al.  White-light interferometric thickness gauge. , 1972, Applied optics.

[14]  H. Herzig.  Micro-Optics : Elements, Systems And Applications , 1997 .

[15]  Wei Gao,et al.  Form Error Characterization of Reflective-Type Gratings , 2012 .

[16]  Ludger Koenders,et al.  Recent developments in dimensional nanometrology using AFMs , 2011 .

[17]  Satoshi Kawata,et al.  Confocal multipoint multiphoton excitation microscope with microlens and pinhole arrays , 2000 .

[18]  Giovanna Brusatin,et al.  Microlens arrays on large area UV transparent hybrid sol-gel materials for optical tools , 2010 .

[19]  Werner P. O. Jueptner,et al.  Characterization of aspherical micro-optics using digital holography: improvement of accuracy , 2002, SPIE Optics + Photonics.

[20]  Jinghua Teng,et al.  Subwavelength lithography by waveguide mode interference , 2011 .

[21]  Hans Zappe,et al.  Combined Twyman-Green and Mach-Zehnder interferometer for microlens testing. , 2005, Applied optics.

[22]  L. Deck,et al.  High-speed noncontact profiler based on scanning white-light interferometry. , 1994, Applied optics.

[23]  Junji Nishii,et al.  SiO2-Based Hybrid Diffractive–Refractive Lenses Fabricated by Femtosecond Laser-Assisted Micromachining , 2008 .

[24]  R. Hocken,et al.  Replication of micro and nano surface geometries , 2011 .

[25]  K Cook,et al.  Comparison of autofocus methods for automated microscopy. , 1991, Cytometry.

[26]  Bethany A. Woody,et al.  Surface profilometry of high aspect ratio features , 2011 .

[27]  Jun-Bo Yoon,et al.  Shape-controlled, high fill-factor microlens arrays fabricated by a 3D diffuser lithography and plastic replication method. , 2004, Optics express.

[28]  T. Fujii,et al.  Three-dimensional displacement measurement of a tube scanner for a scanning tunneling microscope by optical interferometer , 1995 .

[29]  E. Cuche,et al.  Simultaneous amplitude-contrast and quantitative phase-contrast microscopy by numerical reconstruction of Fresnel off-axis holograms. , 1999, Applied optics.

[30]  Yung-Chun Lee,et al.  Fabricating of aspheric micro-lens array by excimer laser micromachining , 2011 .

[31]  Robert D. TeKolste,et al.  Roadmap for micro-optics fabrication , 2001, SPIE Optics + Photonics.

[32]  Wei Gao,et al.  A High Precision AFM for Nanometrology of Large Area Micro-Structured Surfaces , 2005 .

[33]  Hong Yee Low,et al.  Recent developments and design challenges in continuous roller micro- and nanoimprinting , 2012 .

[34]  Wei Gao,et al.  A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage , 2013 .

[35]  Yuichi Okazaki,et al.  Precision nano-fabrication and evaluation of a large area sinusoidal grid surface for a surface encoder , 2003 .

[36]  P. M. Lonardo,et al.  Emerging trends in surface metrology , 2002 .

[37]  Stephen W. Paddock,et al.  Confocal Microscopy , 2019, Methods in Molecular Biology.

[38]  Margaret Stedman,et al.  Limits Of Surface Measurement By Stylus Instruments , 1989, Other Conferences.

[39]  Ian M. Hutchings,et al.  Direct Writing Technology Advances and Developments , 2008 .

[40]  J. Bennett,et al.  Stylus profiling instrument for measuring statistical properties of smooth optical surfaces. , 1981, Applied optics.

[41]  Wei Gao,et al.  An ultra-precision scanning tunneling microscope Z-scanner for surface profile measurement of large amplitude micro-structures , 2011 .

[42]  Martin J Booth,et al.  Addressable microlens array for parallel laser microfabrication. , 2011, Optics letters.

[43]  Johannes Schwider,et al.  Twyman-Green interferometer for testing microspheres , 1995 .

[44]  Nahm-Gyoo Cho,et al.  Assessment of surface profile data acquired by a stylus profilometer , 2012 .

[45]  Franz J. Giessibl,et al.  Advances in atomic force microscopy , 2003, cond-mat/0305119.

[46]  Wei Gao,et al.  A noncontact scanning electrostatic force microscope for surface profile measurement , 2012 .

[47]  Reinhard Voelkel,et al.  Full wafer microlens replication by UV imprint lithography , 2010 .

[48]  Gaoliang Dai,et al.  Accurate and traceable measurement of nano- and microstructures , 2006 .

[49]  Wei Gao,et al.  A fast evaluation method for pitch deviation and out-of-flatness of a planar scale grating , 2010 .

[50]  Ronald M. Reano,et al.  Electron beam direct write of chalcogenide glass integrated optics , 2012 .

[51]  M. Edward Motamedi,et al.  Micro-optics development in the past decade , 2000, SPIE MOEMS-MEMS.

[52]  Christopher J. Evans,et al.  “Structured”, “Textured” or “Engineered” Surfaces , 1999 .

[53]  I. S. Savel’ev.  Reconstruction of the precision surface shape of substrates for reflective X-ray optical components on the basis of single-axis profilometer measurements , 2011 .

[54]  Toshio Ando,et al.  Active damping of the scanner for high-speed atomic force microscopy , 2005 .

[55]  Ekkard Brinksmeier,et al.  Fabrication of complex optical components : from mold design to product , 2013 .

[56]  Ekkard Brinksmeier,et al.  Review on diamond-machining processes for the generation of functional surface structures , 2012 .

[57]  Patrick J. Moyer,et al.  Near-Field Optics: Theory, Instrumentation, and Applications , 1996 .

[58]  D. Lucca,et al.  Surfaces in Precision Engineering, Microengineering and Nanotechnology , 2003 .

[59]  Wei Ph. D. Gao.  Precision Nanometrology: Sensors and Measuring Systems for Nanomanufacturing , 2010 .

[60]  Ronnie R. Fesperman,et al.  Phase Imaging in the Near Field , 2004 .

[61]  Lijiang Zeng,et al.  Fabrication of optical mosaic gratings with phase and attitude adjustments employing latent fringes and a red-wavelength dual-beam interferometer. , 2009, Optics express.

[62]  Gian Bartolo Picotto,et al.  Scanning tunneling microscopy head having integrated capacitive sensors for calibration of scanner displacements , 1996 .

[63]  Byoungho Lee,et al.  Geometrical analysis of optical transmission characteristics of prism sheet layers , 2005 .

[64]  Lijiang Zeng,et al.  Fabrication of optical mosaic gratings: a self-referencing alignment method. , 2011, Optics express.

[65]  Oltmann Riemer,et al.  Diamond machining of micro-optical components and structures , 2010, Photonics Europe.

[66]  Din Ping Tsai,et al.  Near-field scanning optical microscopy using a super-resolution cover glass slip , 2012 .

[67]  MaoQing Jiang,et al.  Characterization of the Binary Micro-Grating Surface by Scanning White Light Interferometry , 2012, 2012 Symposium on Photonics and Optoelectronics.

[68]  G. Schlingloff,et al.  Microlenses as Amplification for CCD-Based Detection Devices for Screening Applications in Biology, Biochemistry, and Chemistry. , 1998, Applied optics.

[69]  Jun-Bo Yoon,et al.  Fabrication of a uniform microlens array over a large area using self-aligned diffuser lithography (SADL) , 2012 .

[70]  Gaoliang Dai,et al.  Metrological large range scanning probe microscope , 2004 .

[71]  Wei Gao,et al.  Surface profile measurement of a sinusoidal grid using an atomic force microscope on a diamond turning machine , 2007 .

[72]  Werner Jüptner,et al.  Digital holography as a tool for testing high-aperture micro-optics , 2005 .

[73]  Tilo Pfeifer,et al.  Optical Methods for Dimensional Metrology in Production Engineering , 2002 .

[74]  F. Fang,et al.  Fabrication of micro DOE using micro tools shaped with focused ion beam. , 2010, Optics express.

[75]  Hans J. Tiziani,et al.  Highly accurate non-contact characterization of engineering surfaces using confocal microscopy , 1998 .

[76]  P. Nussbaum,et al.  Design, fabrication and testing of microlens arrays for sensors and microsystems , 1997 .

[77]  Giuliano Bissacco,et al.  High aspect ratio micro tool manufacturing for polymer replication using μEDM of silicon, selective etching and electroforming , 2008 .

[78]  Yoshikazu Arai,et al.  Precision measurement of micro-lens profile by using a force-controlled diamond cutting tool on an ultra-precision lathe , 2011 .

[79]  Qingze Zou,et al.  A review of feedforward control approaches in nanopositioning for high-speed spm , 2009 .

[80]  Andrew J. Waddie,et al.  Design and fabrication of diffractive optical elements , 1997 .

[81]  H.-U. Danzebrink,et al.  Advances in Scanning Force Microscopy for Dimensional Metrology , 2006 .

[82]  Lijiang Zeng,et al.  Measurement of duty cycles of photoresist grating masks made on top of multilayer dielectric stacks. , 2005, Applied optics.

[83]  Hans Nørgaard Hansen,et al.  Dimensional micro and nano metrology , 2006 .

[84]  Enrico Savio,et al.  Metrology of freeform shaped parts , 2007 .

[85]  Tino Hausotte,et al.  Advanced three-dimensional scan methods in the nanopositioning and nanomeasuring machine , 2009 .

[86]  J Aoki.  Design and Construct of a High-Precision and Long-Stroke AFM Probe-Unit Integrated with a Linear Encoder , 2005 .

[87]  Faramarz Farahi.  Fabrication and metrology of micro- and nano-optics , 2007, European Workshop on Optical Fibre Sensors.

[88]  E. Cuche,et al.  Characterization of microlenses by digital holographic microscopy. , 2006, Applied optics.

[89]  Teodor Veres,et al.  Microlens array fabrication by enhanced thermal reflow process: Towards efficient collection of fluorescence light from microarrays , 2009 .

[90]  Yoshikazu Arai,et al.  Fabrication of Large-area Micro-lens Arrays with Fast Tool Control , 2008 .

[91]  Takahisa Masuzawa,et al.  State of the Art of Micromachining , 2000 .

[92]  Mohammed Ashraf,et al.  Geometrical characterization techniques for microlens made by thermal reflow of photoresist cylinder , 2008 .

[93]  J. McNeil,et al.  Multiparameter grating metrology using optical scatterometry , 1997 .

[94]  Robert J. Hocken,et al.  Optical Metrology of Surfaces , 2005 .

[95]  T. Gaylord,et al.  Rigorous coupled-wave analysis of planar-grating diffraction , 1981 .