Micromachined Dispenser with High Resolution

A micromachined dispenser with a high flow rate and high resolution for chemical analysis is described. The flow rate as a function of the actuation frequency increases linearly up to a frequency of 700Hz with a final value of about 148μl/s using water as a pump medium. The dispensing accuracy is better than 1% (coefficient of variance) at a dispensing volume of 56μl. This dispenser shows good dispensing performance thanks to its precise valve structure and surface-treated nozzle.

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