Surface enrichment of copper due to keV Xe sputtering of an Al-Cu mixture

A surface enrichment of Cu due to keV Xe sputtering of Al‐Cu mixtures has been observed by high‐energy He ion backscattering and by Auger electron spectroscopy. The complementary nature of these two methods provides information on the total Cu enrichment (4.5×1015/cm2) and depth of the altered layer (∼300 A).

[1]  G. Dearnaley.  Stress‐induced effects in sputtering and surface analysis , 1976 .

[2]  H. F. Winters,et al.  Influence of the altered layer on depth profiling measurements , 1976 .

[3]  W. F. V. D. Weg,et al.  Change of surface composition of SiO2 layers during sputtering , 1974 .

[4]  M. Nicolet,et al.  Principles and applications of ion beam techniques for the analysis of solids and thin films , 1973 .

[5]  R. P. Edwin.  Measurements of the sputter rate of fused silica bombarded by argon ions of energy 12-32 keV , 1973 .

[6]  M. Ono,et al.  Quantitative auger analysis of copper-nickel alloy surfaces after argon ion bombardment , 1973 .

[7]  S. Mader,et al.  Formation of second phase particles in aluminum-copper alloy films , 1972 .

[8]  D. T. Quinto,et al.  Auger spectra of copper-nickel alloys , 1971 .

[9]  T. Yamashina,et al.  Auger spectroscopy study on copper-nickel alloy surfaces related to the catalysis , 1971 .

[10]  G. Wehner,et al.  Alloy Sputtering Studies with in situ Auger Electron Spectroscopy , 1971 .

[11]  E. Gillam.  The penetration of positive ions of low energy into alloys and composition changes produced in them by sputtering , 1959 .

[12]  R. Kelly,et al.  On the role of recoil implantation in altering the stoichiometry of a bombarded solid , 1976 .

[13]  F. Käppeler,et al.  Ion beam surface layer analysis , 1976 .

[14]  J. Poate,et al.  The sputtering of PtSi and NiSi , 1975 .

[15]  P. W. Palmberg,et al.  A combined ESCA and Auger spectrometer , 1975 .

[16]  T. W. Haas,et al.  High−spatial resolution Auger spectroscopy and Auger integration applications , 1975 .

[17]  R. Kelly,et al.  The sputtering of oxides part i: a survey of the experimental results , 1973 .