Design and fabrication of an electro-thermal linear motor with large output force and displacement

The design, fabrication and testing of a novel electro-thermal linear motor is presented in this paper. The V-shape electro-thermal actuator arrays, micro lever, micro spring and slider are introduced. In moving operation, the linear motor can move 1 mm displacement while keeping the applied voltage as low as 17 V. In holding operation, the motor can stay in one particular position without consuming energy and no creep deformation is found. Actuation force of 12.7 mN indicates the high force generation capability of the device.

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