Design and Fabrication of Stretchable Multilayer Self-Aligned Interconnects for Flexible Electronics and Large-Area Sensor Arrays Using Excimer Laser Photoablation
暂无分享,去创建一个
[1] Bart Vandevelde,et al. Design of Metal Interconnects for Stretchable Electronic Circuits using Finite Element Analysis , 2007, 2007 International Conference on Thermal, Mechanical and Multi-Physics Simulation Experiments in Microelectronics and Micro-Systems. EuroSime 2007.
[2] P. Mativenga. Micromachining. , 2019, Medical device technology.
[3] Hiroyuki Shinoda,et al. Robot skin based on touch-area-sensitive tactile element , 2006, Proceedings 2006 IEEE International Conference on Robotics and Automation, 2006. ICRA 2006..
[4] D. Krajnovich,et al. Formation of ‘‘intrinsic’’ surface defects during 248 nm photoablation of polyimide , 1993 .
[5] Kanti Jain. Excimer-laser-based multifunctional patterning systems for optoelectronics, MEMS, materials processing, and biotechnology , 2003, SPIE OPTO.
[6] Raghavan Srinivasan,et al. Ultraviolet laser ablation of polyimide films , 1987 .
[7] Kanti Jain,et al. Excimer Laser Lithography , 1990 .
[8] Z. Suo,et al. Stretchable gold conductors on elastomeric substrates , 2003 .
[9] J. Vanfleteren,et al. Biomedical Stretchable Sytems using MID Based Stretchable Electronics Technology , 2007, 2007 29th Annual International Conference of the IEEE Engineering in Medicine and Biology Society.
[10] Kevin Huang,et al. Stretchable silicon sensor networks for structural health monitoring , 2006, SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring.
[11] Sigurd Wagner,et al. Stretchable wavy metal interconnects , 2004 .
[12] Jan Siegel,et al. UV-laser ablation of ductile and brittle metal films , 1997 .
[13] Sheng Liu,et al. Design of a Flexible Stethoscope Sensor Skin Based on MEMS Technology , 2006, 2006 7th International Conference on Electronic Packaging Technology.
[14] B. Ziaie,et al. A multiaxial stretchable interconnect using liquid-alloy-filled elastomeric microchannels , 2008 .