Pump-probe reflectometric and ellipsometric investigation of femtosecond laser pulse induced ablation in molybdenum

Ultrashort pulsed laser sources offer new possibilities in precise and efficient material processing. Deep understanding of the fundamental laser-material interaction aspects is of great importance. We report on pump-probe reflectometric investigations of the ablation process on molybdenum over the complete temporal process range from the pulse impact to the final steady state. The ablation process can roughly be separated in three sections. In the first tens of picoseconds mainly the optical material properties are changed without significant material motion. Between 50 ps and a few ns the irradiated material is bulging in a spallation or phase explosion process. The actual ablation by material ejection is observed at delay times greater than 20 ns. The transient reflectivity during and in the first tens of ps after the laser irradiation in conjunction with the transient absorption influences decisively the laser-matter interaction for example when working with longer pulse durations or double pulse sequences. Direct measurements of the absorption properties by ultrafast time-resolved ellipsometry at fluences close to the ablation threshold fluence are missing to date. In this paper, pump-probe ellipsometric measurements on molybdenum – complementing the pump-probe reflectometric measurements – are presented showing ultrafast changes of the complex refractive index N = n – ik including additional information on the absorption. The imaginary part k is reduced already after 10 ps by 50% representing an increase of the optical penetration depth by a reduction of the material density. These extensive investigations pave the road towards a better understanding of pulse duration dependent laser ablation efficiency, double or burst mode laser ablation and lattice modifications in the first ps after the laser pulse impact.

[1]  A. Tünnermann,et al.  Femtosecond, picosecond and nanosecond laser ablation of solids , 1996 .

[2]  J. Liu Simple technique for measurements of pulsed Gaussian-beam spot sizes. , 1982, Optics letters.

[3]  J. Limpert,et al.  High speed laser drilling of metals using a high repetition rate, high average power ultrafast fiber CPA system. , 2008, Optics express.

[4]  Klaus Sokolowski-Tinten,et al.  Transient States of Matter during Short Pulse Laser Ablation , 1998 .

[5]  Michael Y. Frankel,et al.  Transient ellipsometric surface photoreflectance applied to GaAs , 1994 .

[6]  Klaus Sokolowski-Tinten,et al.  The physical mechanisms of short-pulse laser ablation , 2000 .

[7]  A. Tünnermann,et al.  Plasma evolution during metal ablation with ultrashort laser pulses. , 2005, Optics express.

[8]  B. Jaeggi,et al.  Optimization of the volume ablation rate for metals at different laser pulse-durations from ps to fs , 2012, LASE.

[9]  Mool C. Gupta,et al.  Pulse width effect in ultrafast laser processing of materials , 2005 .

[10]  M. Kandyla,et al.  Femtosecond dynamics of the laser-induced solid-to-liquid phase transition in aluminum , 2007, 2007 Quantum Electronics and Laser Science Conference.

[11]  Jan Siegel,et al.  Controlling ablation mechanisms in sapphire by tuning the temporal shape of femtosecond laser pulses , 2015 .

[12]  Pavel R. Levashov,et al.  Determination of the transport and optical properties of a nonideal solid-density plasma produced by femtosecond laser pulses , 2007 .

[13]  Robin S. Marjoribanks,et al.  Ultra high repetition rate (133 MHz) laser ablation of aluminum with 1.2-ps pulses , 1999 .

[14]  Matthias Domke,et al.  Laser lift-off initiated by direct induced ablation of different metal thin films with ultra-short laser pulses , 2012 .

[15]  K. Sokolowski-Tinten,et al.  Laser-solid interaction in the femtosecond time regime , 1997 .

[16]  S. Anisimov,et al.  Electron emission from metal surfaces exposed to ultrashort laser pulses , 1974 .

[17]  Guido Hennig,et al.  Laser engraving in gravure industry , 2005, EPIC/SPIE Workshop on Laser Applications in Europe.

[18]  K. Sokolowski-Tinten,et al.  Timescales in the response of materials to femtosecond laser excitation , 2004 .

[19]  Matthias Domke,et al.  Ultrafast pump-probe microscopy reveals the mechanism of selective fs laser structuring of transparent thin films for maskless micropatterning , 2014 .

[20]  Jean-François Guillemoles,et al.  Comparative investigation of solar cell thin film processing using nanosecond and femtosecond lasers , 2006 .

[21]  Ralf Knappe,et al.  Fast micromachining using picosecond lasers , 2005, SPIE LASE.

[22]  M Y Frankel Optimization of a femtosecond ellipsometer for gold photoreflectance studies. , 1994, Optics letters.

[23]  Matthias Domke,et al.  Ultrafast pump-probe microscopy with high temporal dynamic range. , 2012, Optics express.

[24]  M. Meunier,et al.  Thermodynamic pathways to melting, ablation, and solidification in absorbing solids under pulsed laser irradiation , 2006 .

[25]  G. Mourou,et al.  Laser ablation and micromachining with ultrashort laser pulses , 1997 .

[26]  Klaus Sokolowski-Tinten,et al.  Physical mechanisms of short-pulse laser ablation , 1999, Other Conferences.

[27]  Zhibin Lin,et al.  Atomistic Modeling of Short Pulse Laser Ablation of Metals: Connections between Melting, Spallation, and Phase Explosion† , 2009 .

[28]  R. Stoian,et al.  Ultrafast switching of surface plasmonic conditions in nonplasmonic metals , 2015, 1509.03182.

[29]  A. Semerok,et al.  Ultrashort double pulse laser ablation of metals , 2004 .

[30]  Perry,et al.  Laser-induced damage in dielectrics with nanosecond to subpicosecond pulses. , 1995, Physical review letters.

[31]  J. Güdde,et al.  Electron and lattice dynamics following optical excitation of metals , 2000 .

[32]  Guillaume Petite,et al.  Femtosecond, picosecond, and nanosecond laser microablation: laser plasma and crater investigation , 2001, European Conference on Laser Interaction with Matter.

[33]  Michael Schmidt,et al.  Ultrafast pump-probe ellipsometry setup for the measurement of transient optical properties during laser ablation. , 2016, Optics express.

[34]  Beat Neuenschwander,et al.  Measuring the complex refractive index of metals in the solid and liquid state and its influence on the laser machining , 2013, Photonics West - Lasers and Applications in Science and Engineering.

[35]  Ilya Mingareev,et al.  Melt dynamics of aluminum irradiated with ultrafast laser radiation at large intensities , 2009 .

[36]  Leonid V. Zhigilei,et al.  Microscopic mechanisms of laser spallation and ablation of metal targets from large-scale molecular dynamics simulations , 2013, Applied Physics A.

[37]  John Nees,et al.  Femtosecond-laser-induced delamination and blister formation in thermal oxide films on silicon (100) , 2006 .

[38]  Jan Siegel,et al.  Time- and space-resolved dynamics of ablation and optical breakdown induced by femtosecond laser pulses in indium phosphide , 2008 .