Coherence measurement technique for short‐wavelength light sources

This paper proposes and analyzes a technique that will allow the spatial coherence properties of short‐wavelength radiation sources to be measured. The technique is based on the analysis of the partially coherent diffraction patterns produced by a uniformly redundant array.This paper proposes and analyzes a technique that will allow the spatial coherence properties of short‐wavelength radiation sources to be measured. The technique is based on the analysis of the partially coherent diffraction patterns produced by a uniformly redundant array.