Logic LSI Yield Improvement Analysis By Means of Fault Diagnosis

Advancements consequent on the increase in functions and the decrease in the size and weight of home electrical appliances and various related devices have been promoting improvements to the micro-fabrication technologies. This trend is tending to bring about increases in the scale of the LSIs that are used in them. In the case of the LSIs, it is extremely important to ramp up and maintain a high yield from the start of production and to supply high-quality products stably both from the viewpoints of acquiring customer confidence and of securing profits. This paper is intended to introduce a fault identification technology, which is an innovation that features a pinpoint identification capability. This solution is important in quickly clarifying the causes affecting the yield. Some aspects of actual cases are also examined.