论文信息 - Improved Initial Growth Behavior of SrO and SrTiO3 Films Grown by Atomic Layer Deposition Using {Sr(demamp)(tmhd)}2 as Sr-Precursor - 字舞流文

Improved Initial Growth Behavior of SrO and SrTiO3 Films Grown by Atomic Layer Deposition Using {Sr(demamp)(tmhd)}2 as Sr-Precursor

C. Hwang | Sang Woon Lee | J. Han | B. Park | W. Jeon | Cheol Hyun An | Han Joon Kim | Woongkyu Lee | C. G. Kim | Taek‐Mo Chung | Taeyong Eom | S. M. George | Min Jung Chung