Design and simulation of MEMS piezoelectric gyroscope

Tracking the position of an object is an important engineering problem that finds many application areas including military, industrial, medical, and consumer applications. This problem is effectively solved with gyroscopes, and these sensors find the orientation and angular velocity Knowing linear acceleration and angular velocity in three dimensions is enough to track the motion of the system with the help of additional mathematical operations. solved with gyroscopes, and these sensors find the orientation and angular velocity Knowing linear acceleration and angular velocity in three dimensions is enough to track the motion of the system with the help of additional mathematical operations. MEMS piezoelectric gyroscope is an inertial sensing integrated circuit that measures the angle and rate of rotation in an object or system. Programmable for targeted applications, this technology relies on three dimensional axes of sensing, which are X (pitch), Y (roll), and Z (yaw). In this paper, we have reported the design and simulation of MEMS piezoelectric gyroscope by COMSOL Multiphysics.