Adaptive optimization in ultrafast laser material processing (Plenary Paper)

Ultrafast lasers promise to become attractive and reliable tools for material processing on micro- and nanoscale. The additional possibility to temporally tailor ultrashort laser pulses by Fourier synthesis of spectral components enables extended opportunities for optimal processing of materials. An experimental demonstration of the technique showing the possibility to design particular excitation sequences tailored with respect to the individual material response will be described, laying the groundwork for adaptive optimization in materials structuring. We report recent results related to the implementation of self-learning, adaptive loops based on temporal shaping of the ultrafast laser pulses to control laser-induced phenomena for practical applications. Besides the fundamental interest, it is shown that under particular excitation conditions involving modulated excitation, the energy flow can be controlled and the material response can be guided to improve processing results. Examples are given illuminating the possibility to control and manipulate the kinetic properties of ions emitted from laser irradiated semiconductor samples using excitation sequences synchronized with the phase transformation characteristic times.

[1]  Yaron Silberberg,et al.  Coherent quantum control of two-photon transitions by a femtosecond laser pulse , 1998, Nature.

[2]  E. Mazur,et al.  Ultrafast-laser driven micro-explosions in transparent materials , 1997 .

[3]  E. Campbell,et al.  Surface charging and impulsive ion ejection during ultrashort pulsed laser ablation. , 2002, Physical review letters.

[4]  U. Keller,et al.  Optimization of adaptive feedback control for ultrafast semiconductor spectroscopy , 2001 .

[5]  K R Wilson,et al.  Detection of nonthermal melting by ultrafast X-ray diffraction. , 1999, Science.

[6]  Jan Siegel,et al.  UV-laser ablation of ductile and brittle metal films , 1997 .

[7]  H. Rabitz,et al.  Teaching lasers to control molecules. , 1992, Physical review letters.

[8]  E. Campbell,et al.  Ion time-of-flight analysis of ultrashort pulsed laser-induced processing of Al2O3 , 2000 .

[9]  Gerard Mourou,et al.  SHORT-PULSE LASER DAMAGE IN TRANSPARENT MATERIALS AS A FUNCTION OF PULSE DURATION , 1999 .

[10]  S. Fourmaux,et al.  Non-thermal melting in semiconductors measured at femtosecond resolution , 2001, Nature.

[11]  Klaus Sokolowski-Tinten,et al.  Transient States of Matter during Short Pulse Laser Ablation , 1998 .

[12]  Kevin Barraclough,et al.  I and i , 2001, BMJ : British Medical Journal.

[13]  J. P. Callan,et al.  Universal dynamics during and after ultrafast laser-induced semiconductor-to-metal transitions , 2001 .

[14]  D. Bucknall,et al.  Control of Chemical Reactions by Feedback-Optimized Phase-Shaped Femtosecond Laser Pulses , 1998 .

[15]  Klaus Sokolowski-Tinten,et al.  Generation of dense electron-hole plasmas in silicon , 2000 .

[16]  Guillaume Petite,et al.  Time-resolved studies of carriers dynamics in wide band gap materials , 1996 .

[17]  John E. Sipe,et al.  OBSERVATION OF COHERENTLY CONTROLLED PHOTOCURRENT IN UNBIASED, BULK GAAS , 1997 .

[18]  Razvan Stoian,et al.  Laser ablation of dielectrics with temporally shaped femtosecond pulses , 2002 .

[19]  G. Mourou,et al.  Femtosecond Optical Breakdown in Dielectrics , 1998 .

[20]  Boris N. Chichkov,et al.  Far-field and near-field material processing with. femtosecond laser pulses , 1999 .

[21]  Gerber,et al.  Control of chemical reactions by feedback-optimized phase-shaped femtosecond laser pulses , 1998, Science.

[22]  Jan Siegel,et al.  Dynamics of Ultrafast Phase Changes in Amorphous GeSb Films , 1998 .

[23]  T. Choi,et al.  Femtosecond laser induced ablation of crystalline silicon upon double beam irradiation , 2002 .

[24]  Gerald Earle Jellison,et al.  Measurements of the optical properties of liquid silicon and germanium using nanosecond time-resolved ellipsometry , 1987 .

[25]  A Ostendorf,et al.  Sub-diffraction limited structuring of solid targets with femtosecond laser pulses. , 2000, Optics express.

[26]  Andrew M. Weiner,et al.  Spectral windowing of frequency‐modulated optical pulses in a grating compressor , 1985 .

[27]  Razvan Stoian,et al.  Temporal pulse manipulation and ion generation in ultrafast laser ablation of silicon , 2003 .

[28]  H. Rabitz,et al.  Coherent learning control of vibrational motion in room temperature molecular gases , 2001 .

[29]  R. Yen,et al.  Femtosecond-Time-Resolved Surface Structural Dynamics of Optically Excited Silicon , 1983 .

[30]  Perry,et al.  Laser-induced damage in dielectrics with nanosecond to subpicosecond pulses. , 1995, Physical review letters.

[31]  Guillaume Petite,et al.  Ultrafast carrier dynamics in laser-excited materials: subpicosecond optical studies , 1999 .

[32]  G. Mourou,et al.  Laser ablation and micromachining with ultrashort laser pulses , 1997 .

[33]  E. Campbell,et al.  Electronic transport and consequences for material removal in ultrafast pulsed laser ablation of materials , 2004 .

[34]  I. Christov,et al.  Shaped-pulse optimization of coherent emission of high-harmonic soft X-rays , 2000, Nature.

[35]  Salvatore Amoruso,et al.  Thermal and nonthermal ion emission during high-fluence femtosecond laser ablation of metallic targets , 2000 .

[36]  Michael Reichling,et al.  Femtosecond laser pulse excitation of electrons and excitons in CaF2 and SrF2 , 2001 .

[37]  T. Feurer,et al.  Spatiotemporal Coherent Control of Lattice Vibrational Waves , 2003, Science.

[38]  David Ashkenasi,et al.  Femtosecond laser ablation of sapphire : time-of-flight analysis of ablation plume , 1998 .

[39]  A. M. Weinera Femtosecond pulse shaping using spatial light modulators , 2000 .

[40]  Razvan Stoian,et al.  Dynamic temporal pulse shaping in advanced ultrafast laser material processing , 2003 .

[41]  David Ashkenasi,et al.  Pulse-width influence on laser structuring of dielectrics , 1997 .

[42]  E. Campbell,et al.  Coulomb explosion in ultrashort pulsed laser ablation of Al 2 O 3 , 2000 .

[43]  G. Gibson,et al.  ULTRAFAST ELECTRON DYNAMICS IN FEMTOSECOND OPTICAL BREAKDOWN OF DIELECTRICS , 1999 .