INTEGRATED PARYLENE ELECTROSTATIC PERISTALTIC PUMP

Here we present a new Parylene surface-micromachining technology and its application to an electrostatically actuated peristaltic micropump. CVD Parylene is used as the structural material; photoresist as the sacrificial material; and Cr/Au as the electrode material. This versatile process enables a peristaltic pump design in which the electrical field does not pass through the fluid. Testing shows an electrostatic pull-in voltage of 150 V for a 200 urn diameter pumping membrane. 3 and 6 phase peristaltic actuation sequences are used and pumping of both water and ethanol is demonstrated. A peak pumping rate of 2 nWmin (flow velocity of 100 pm/see) is achieved at 60 Hz for ethanol. Higher flow rates (> lOnL/min) are feasible with an improved design.

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