论文信息 - Reactive magnetron cosputtering of hard and conductive ternary nitride thin films: Ti–Zr–N and Ti–Ta–N - 字舞流文

Reactive magnetron cosputtering of hard and conductive ternary nitride thin films: Ti–Zr–N and Ti–Ta–N

P. Villechaise | A. Debelle | G. Abadias | G. N. Tolmachova | T. Sauvage | S. Dub | L. Koutsokeras | G. Tolmachova