Room Temperature Nanoimprint Technology Using Hydrogen Silsequioxane (HSQ)
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S. Matsui | H. Namatsu | H. Ishigaki | Y. Ochiai | H. Hiroshima | M. Komuro | J. Fujita | M. Ishida | Y. Igaku
[1] S. Matsui,et al. Imprint Characteristics by Photo-Induced Solidification of Liquid Polymer , 2000, Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.00EX387).