Design and implementation of a novel rotary micropositioning system driven by linear voice coil motor.

Limited-angle rotary micropositioning stages are required in precision engineering applications where an ultrahigh-precision rotational motion within a restricted range is needed. This paper presents the design, fabrication, and control of a compliant rotary micropositioning stage dedicated to the said applications. To tackle the challenge of achieving both a large rotational range and a compact size, a new idea of multi-stage compound radial flexure is proposed. A compact rotary stage is devised to deliver an over 10° rotational range while possessing a negligible magnitude of center shift. The stage is driven by a linear voice coil motor and its output motion is measured by laser displacement sensors. Analytical models are derived to facilitate the parametric design, which is validated by conducting finite element analysis. The actuation and sensing issues are addressed to guarantee the stage performance. A prototype is fabricated and a proportional-integral-derivative control is implemented to achieve a precise positioning. Experimental results demonstrate a resolution of 2 μrad over 10° rotational range as well as a low level of center shift of the rotary micropositioning system.