论文信息 - Effects of the pretreatment of Si substrate before the pre-deposition of Al on GaN-on-Si - 字舞流文

Effects of the pretreatment of Si substrate before the pre-deposition of Al on GaN-on-Si

Y. Hao | Q. Feng | Jincheng Zhang | Tao Zhang | Zhen Bi | Yachao Zhang | Jinbang Ma | Yixin Yao | Yifan Li