Deep X-Ray Lithography

This chapter emphasizes the strengths of the manufacturing method and its main fields of application with examples taken from various groups worldwide, especially in micro-mechanics and micro-optics. The leading technology for the manufacturing of MEMS (micro-electric-mechanical systems) devices is silicon micro-machining with its various derivatives. Many applications of micro-systems have requirements in respect of materials, geometry, aspect ratio, dimensions, shape, accuracy of micro-structures, and number of parts that cannot be fulfilled easily by mainstream silicon-based micro-machining technologies. LIGA, a German acronym for Lithography (Lithographie), Electroplating (Galvanoformung), and Molding (Abformung) enables the highly precise manufacture of high aspect ratio micro-structures with large structural thickness ranging from hundreds to thousands of microns. These tall micro-structures can be produced in a variety of materials with well-defined geometry and dimensions, very straight and smooth side walls, and tight tolerances. LIGA technology is also well suited for the mass fabrication of parts, particularly in polymers. Many micro-systems benefit from the unique characteristics and advantages of the LIGA process in terms of product performance.

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