Modelling and validation of air damping in perforated gold and silicon MEMS plates

Dynamic behaviour of oscillating perforated plates for MEMS applications under the effect of squeeze film damping is studied. Two geometrical topology types of gold and silicon plates were manufactured with many different geometrical dimensions for the plate and the holes. The structures were electrostatically excited to vibrate at their fundamental modes and the vibration amplitudes were measured optically. The quality factors have been extracted from the measurements using the half-power method. Multiphysics FEM simulations for the structures were performed for comparison. Also, a study to characterize the air flow around the oscillating structure was performed, and a compact model was chosen to estimate the quality factor due to gas damping. Besides the damping, other dissipation mechanisms were also studied.

[1]  Robert Sattler,et al.  Compact Models for SqueezeFilm Damping in the Slip Flow Regime , 2004 .

[2]  Aurelio Somà,et al.  Experimental validation of compact damping models of perforated MEMS devices , 2009 .

[3]  Timo Veijola,et al.  Compact models for squeezed-film dampers with inertial and rarefied gas effects , 2004 .

[4]  Ya-Pu Zhao,et al.  Squeeze-film effects in MEMS devices with perforated plates for small amplitude vibration , 2006 .

[5]  Gerhard Wachutka,et al.  Accurate system-level damping model for highly perforated micromechanical devices , 2004 .

[6]  B. Schauwecker,et al.  Reduced order modeling of fluid structural interactions in MEMS based on model projection techniques , 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).

[7]  Aurelio Somà,et al.  Numerical and experimental comparison of MEMS suspended plates dynamic behaviour under squeeze film damping effect , 2008 .

[8]  T. Veijola,et al.  Compact Squeezed-Film Damping Model for Perforated Surface , 2001 .

[9]  Timo Veijola,et al.  Comparative numerical study of FEM methods solving gas damping in perforated MEMS devices , 2008 .

[10]  T. Veijola,et al.  Gas damping effect on thin vibrating gold plates: Experiments and modeling , 2009, 2009 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS.

[11]  Rudra Pratap,et al.  A comparative study of analytical squeeze film damping models in rigid rectangular perforated MEMS structures with experimental results , 2008 .

[12]  Timo Veijola.  Analytic Damping Model for a Square Perforation Cell , 2006 .

[13]  M. Roukes,et al.  Thermoelastic damping in micro- and nanomechanical systems , 1999, cond-mat/9909271.

[14]  Timo Veijola.  Analytic damping model for an MEM perforation cell , 2006 .

[15]  Timo Veijola,et al.  Extending the validity of squeezed-film damper models with elongations of surface dimensions , 2005 .

[16]  Venkata R. Sonti,et al.  Analytical solutions for the stiffness and damping coefficients of squeeze films in MEMS devices with perforated back plates , 2005 .

[17]  Yuancheng Sun,et al.  Modified Reynolds' equation and analytical analysis of squeeze-film air damping of perforated structures , 2003 .

[18]  M.S. Weinberg,et al.  Fluid effects in vibrating micromachined structures , 2005, Journal of Microelectromechanical Systems.

[19]  Young-Ho Cho,et al.  Effect of holes and edges on the squeeze film damping of perforated micromechanical structures , 1999 .

[20]  Aurelio Soma,et al.  Energetic method for non linear dynamic characterization of MEMS squeeze filmdamping , 2008 .

[21]  Alvise Bagolini,et al.  Stress characterization of electroplated gold layers for low temperature surface micromachining , 2003, Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003..

[22]  Timo Veijola,et al.  Methods for Solving Gas Damping Problems in Perforated Microstructures Using a 2D Finite-Element Solver , 2007, Sensors (Basel, Switzerland).

[23]  Anja Boisen,et al.  Effect of gold coating on the Q-factor of a resonant cantilever , 2005 .

[24]  J. B. Starr.  Squeeze-film damping in solid-state accelerometers , 1990, IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop.