Low-parasitic, planar Schottky diodes for millimeter-wave integrated circuits

The design and fabrication of air-bridged, ultra-low-capacitance Schottky barrier diodes are described. Mott diodes, for mixer applications, and varactor diodes, for use in frequency multipliers, have been produced simultaneously on epitaxial wafers grown by molecular beam epitaxy. Typical mixer diodes have a nominal anode contact area of 4 mu m/sup 2/ and exhibit a total zero-bias capacitance of 4.0-4.5 fF (including a parasitic capacitance of approximately 1.0 fF) and a series resistance of 6-8 Omega . Diode chips have been incorporated in hybrid integrated circuit (MIC) mixers for 33-50 GHz and 75-110 GHz and an MIC frequency tripler for 90-140 GHz. Fully monolithic (MMIC) subharmonically pumped mixers for 75-110 GHz have also been fabricated and tested. >

[1]  R. Mattauch,et al.  Unified theory of high‐frequency noise in Schottky barriers , 1973 .

[2]  N. Cheung,et al.  Extraction of Schottky diode parameters from forward current-voltage characteristics , 1986 .

[3]  B. E. Spielman.  Millimeter-Wave Monolithic Integrated Circuits , 1986, 1986 16th European Microwave Conference.

[4]  Peter H. Siegel,et al.  Design and Analysis of the Channel Waveguide Transformer , 1983 .

[5]  M. T. Faber,et al.  Computer-Aided Testing of Mixers Between 90 and 350 GHz , 1985 .

[6]  J. W. Archer.  An Efficient 200-290-GHz Frequency Tripler Incorporating a Novel Stripline Structure , 1984 .

[7]  R. Mattauch,et al.  A Novel Whiskerless Schottky Diode for Millimeter and Submillimeter Wave Application , 1987, 1987 IEEE MTT-S International Microwave Symposium Digest.

[8]  H. H. Meinel.  Millimeter-wave systems and applications in Europe , 1988, 1988., IEEE MTT-S International Microwave Symposium Digest.

[9]  Anthony R. Kerr,et al.  Low-noise 115-GHz receiver using superconducting tunnel junctions , 1983 .

[10]  D. Marquardt.  An Algorithm for Least-Squares Estimation of Nonlinear Parameters , 1963 .

[11]  N. Cronin,et al.  Planar Millimeter-Wave Diode Mixer (Short Paper) , 1985 .

[12]  B. Jarry,et al.  94 GHz microstrip monolithic GaAs mixer , 1986 .

[13]  M. T. Faber,et al.  Low-Noise, Fixed Tuned, Broadband Mixer for 200-270 GHz , 1984 .

[14]  W. W. Snell,et al.  Millimeter-Wave Receivers with Subharmonic Pump , 1976 .