Oxygen Diffusion in Vapor‐Deposited Indium Oxide Films

Diffusion measurements were made between 1000 and 1300 K on films of In2O3 by electrochemical techniques using an yttria-stabilized zirconia solid electrolyte. At atmospheric oxygen pressures, diffusion invariably occurred via an oxygen interstitial mechanism. The diffusion coefficient decreased with decreasing oxygen pressure with a PO21/2 dependence. Near 1.0 Pa PO2the mechanism began to change to a vacancy mechanism which dominated at PO2 <10−3 Pa, where diffusivity increased with further decrease in oxygen pressure according to a PO2−1/2 dependence. Activation energies for interstitial and vacancy diffusion were 166 and 190 kJ/mol, respectively.

[1]  G. P. Wirtz,et al.  Electrical Conduction in Single-Crystal Thallic Oxide: I, Crystals “As-Grown” from the Vapor in Air , 1977 .

[2]  J. Wit.  Structural aspects and defect chemistry in In2O3 , 1977 .

[3]  J. Fouletier,et al.  Measurement and regulation of oxygen content in selected gases using solid electrolyte cells. I. Discontinuous use of gauges , 1974 .

[4]  D. W. Short,et al.  The Control of Oxygen Activities in Argon‐Oxygen Mixtures by Coulometric Titration , 1974 .

[5]  J. Wit.  Electrical properties of In2O3 , 1973 .

[6]  D. B. Fraser,et al.  Highly Conductive, Transparent Films of Sputtered In2 − x Sn x O 3 − y , 1972 .

[7]  R. Steiner,et al.  Festelektrolytzellen auf ZrO2‐Basis und deren Anwendungen , 1972 .

[8]  D. Archer,et al.  Stannic oxide and indium oxide films as air electrodes for high temperature coal reacting fuel cells. [Zirconia ceramic electrolyte] , 1969 .

[9]  D. Wilder,et al.  Diffusion of Oxygen in Selected Monocrystalline Rare Earth Oxides , 1968 .

[10]  H. H. Tippins,et al.  Effect of MgO on the Crystal‐Growth Defects and Optical Absorption of Flux‐Grown In2O3 , 1967 .

[11]  M. Marezio.  Refinement of the crystal structure of In2O3 at two wavelengths , 1966 .

[12]  M. Arvin.  Electrical conductivity and thermoelectric power of indium oxide , 1962 .

[13]  R. L. Weiher.  Electrical Properties of Single Crystals of Indium Oxide , 1962 .

[14]  M. Lavine,et al.  THE OXIDATION OF INTERMETALLIC COMPOUNDS. I. HIGH TEMPERATURE OXIDATION OF InSb1 , 1960 .

[15]  J. Wit,et al.  Electron concentration and mobility in In2O3 , 1977 .

[16]  H. Müller.  Electrical and Optical Properties of Sputtered In2O3 films. I. Electrical Properties and Intrinsic Absorption , 1968 .

[17]  R. Groth.  Untersuchungen an halbleitenden Indiumoxydschichten , 1966 .

[18]  Howard F. McMurdie,et al.  Phase diagrams for ceramists , 1964 .