A planar PDMS micropump using in-contact minimized-leakage check valves

We present a micropump with a simple planar design featuring compliant in-contact check valves in a single layer, which allows for a simple structure and easy system integration. The micropump, based on poly(dimethylsiloxane) (PDMS), primarily consists of a pneumatically driven thin membrane, a pump chamber, and two in-plane check valves. The pair of check valves is based on an in-contact flap-stopper configuration and is able to minimize leakage flow, greatly enhancing the reliability and performance of the micropump. Systematic experimental characterization of the micropump has been performed in terms of the frequency response of the pumping flow rate with respect to factors including device geometry (e.g. chamber height) and operating parameters (e.g. pneumatic driving pressure and backpressure). The results demonstrate that this micropump is capable of reliably generating a maximum flow rate of 41 μL min-1 and operating against a high backpressure of up to 25 kPa. In addition, a lumped-parameter theoretical model for the planar micropump is also developed for accurate analysis of the device behavior. These results demonstrate the capability of this micropump for diverse applications in lab-on-a-chip systems.

[1]  D. Maillefer,et al.  A high-performance silicon micropump for an implantable drug delivery system , 1999, Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291).

[2]  Peter Woias,et al.  Micropumps—past, progress and future prospects , 2005 .

[3]  Jaesung Jang,et al.  Theoretical and experimental study of MHD (magnetohydrodynamic) micropump , 2000 .

[4]  D. Beebe,et al.  Three-dimensional micro-channel fabrication in polydimethylsiloxane (PDMS) elastomer , 2000, Journal of Microelectromechanical Systems.

[5]  H. Lintel,et al.  A piezoelectric micropump based on micromachining of silicon , 1988 .

[6]  Juan G. Santiago,et al.  A review of micropumps , 2004 .

[7]  J. Fluitman,et al.  A thermopneumatic micropump based on micro-engineering techniques , 1990 .

[8]  Y. Tai,et al.  A check-valved silicone diaphragm pump , 2000, Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308).

[9]  B. Hamrock,et al.  Fundamentals of Fluid Film Lubrication , 1994 .

[10]  Babak Ziaie,et al.  A magnetically driven PDMS micropump with ball check-valves , 2005 .

[11]  Neil M. White,et al.  A novel micromachined pump based on thick-film piezoelectric actuation , 1998 .

[12]  Yong-Sang Kim,et al.  A dispoasble polydimethylsiloxane-based diffuser micropump actuated by piezoelectric-disc , 2004 .

[13]  Jun Xie,et al.  Surface micromachined electrostatically actuated micro peristaltic pump. , 2004, Lab on a chip.

[14]  J. Baek,et al.  Photopolymerized check valve and its integration into a pneumatic pumping system for biocompatible sample delivery. , 2006, Lab on a chip.

[15]  P. Bergveld,et al.  A plastic micropump constructed with conventional techniques and materials , 1999 .

[16]  I. Tahhan,et al.  A modular structured, planar micro pump with no moving part (NMP) valve for fluid handling in microanalysis systems , 2002, 2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology. Proceedings (Cat. No.02EX578).

[17]  G. S. Wilson,et al.  A positive displacement micropump for microdialysis , 1998 .

[18]  D. Liepmann,et al.  A planar micropump utilizing thermopneumatic actuation and in-plane flap valves , 2004, 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest.

[19]  G. Whitesides.  The origins and the future of microfluidics , 2006, Nature.

[20]  Guolin Xu,et al.  A Disposable Self-Priming And Bubble Tolerance Pneumatic Actuation Micro-Pump , 2003, Int. J. Comput. Eng. Sci..

[21]  Yong-Sang Kim,et al.  A disposable thermopneumatic-actuated micropump stacked with PDMS layers and ITO-coated glass , 2005 .

[22]  P. Tracqui,et al.  Optimization of poly-di-methyl-siloxane (PDMS) substrates for studying cellular adhesion and motility , 2008 .

[23]  Dermot Diamond,et al.  Performance characteristics of a polypyrrole modified polydimethylsiloxane (PDMS) membrane based microfluidic pump , 2008 .

[24]  Young Jin Choi,et al.  A novel polydimethylsiloxane microfluidic system including thermopneumatic-actuated micropump and Paraffin-actuated microvalve , 2007 .

[25]  Hsueh-Chia Chang,et al.  A new electro-osmotic pump based on silica monoliths , 2006 .

[26]  Weileun Fang,et al.  A novel electromagnetic elastomer membrane actuator with a semi-embedded coil , 2007 .

[27]  G. Whitesides,et al.  Rapid Prototyping of Microfluidic Systems in Poly(dimethylsiloxane). , 1998, Analytical chemistry.

[28]  J. G. E. Gardeniers,et al.  Lab-on-a-chip systems for biomedical and environmental monitoring , 2003, Int. J. Comput. Eng. Sci..

[29]  Guo-Hua Feng,et al.  Piezoelectrically actuated dome-shaped diaphragm micropump , 2005 .

[30]  M. Richter,et al.  A bidirectional silicon micropump , 1995 .

[31]  Gwo-Bin Lee,et al.  Pneumatically driven peristaltic micropumps utilizing serpentine-shape channels , 2006 .

[32]  Qiao Lin,et al.  Planar micro-check valves exploiting large polymer compliance , 2007 .