论文信息 - A novel high temperature pressure sensor on the basis of SOI layers - 字舞流文

A novel high temperature pressure sensor on the basis of SOI layers

Jiang Zhuangde | Zhao Libo | Zhao Yulong | Zhuangde Jiang | J. Zhuangde | Zhao Yulong | Zhao Li-bo | Zhao Libo | Yulong Zhao

[1] Patrice Rey,et al. SOI 'SIMOX'; from bulk to surface micromachining, a new age for silicon sensors and actuators , 1995 .

[2] Martin Eickhoff,et al. Silicon compatible materials for harsh environment sensors , 1999 .

[3] Gertrud Kräuter,et al. Silicon-on-insulator: materials aspects and applications , 2000 .

[4] Wilfried Mokwa,et al. CMOS-compatible capacitive high temperature pressure sensors , 2000 .