论文信息 - Temperature Stability of Electrode/AlScN Multilayer Systems for pMUT Process Integration - 字舞流文

Temperature Stability of Electrode/AlScN Multilayer Systems for pMUT Process Integration

T. Pensala | M. Paulasto-Kröckel | S. Mertin | C. Karuthedath | G. Ross | K. Bespalova | Abhilash Sebastian Thanniyil | A. S. Thanniyil