Design and optimization based on uncertainty analysis in electro-thermal excited MEMS resonant sensor

A vibration model of double-clamped resonant beam that is driven by electro-thermal excitation for a MEMS resonant sensor is established. The sample-based stochastic model is established to investigate the influence of different uncertain structure size and excitation parameters on sensor performance. Effects of uncertainty distributions of structure size and excitation voltage due to fabricating or control errors on sensor performance, including nature frequency Frn, quality factor per unit amplitude Qamp, and the detecting sensitivity Sp, are studied. The results can be used as references for design and optimization of the structure size and excitation parameters of electro-thermal excited MEMS resonant sensor.

[1]  G. Apostolakis.  The concept of probability in safety assessments of technological systems. , 1990, Science.

[2]  Richard Evelyn Donohue Bishop,et al.  Vibration Analysis Tables , 1956 .

[3]  Shangchun Fan,et al.  Design and FEM simulation study of the electro-thermal excitation resonant beam with slit-structure , 2013 .

[4]  Shangchun Fan,et al.  An electrothermally excited dual beams silicon resonant pressure sensor with temperature compensation , 2011 .

[5]  Matthew R. Myers,et al.  A model for unsteady analysis of preform drawing , 1989 .

[6]  A. Mawardi,et al.  Numerical Simulations of an Optical Fiber Drawing Process Under Uncertainty , 2008, Journal of Lightwave Technology.

[7]  Weiwei Xing,et al.  Non-linear dynamics of an electrothermally excited resonant pressure sensor , 2012 .

[8]  A. Mawardi,et al.  Effects of parameter uncertainty on the performance variability of proton exchange membrane (PEM) fuel cells , 2006 .

[9]  J. Sader.  Frequency response of cantilever beams immersed in viscous fluids with applications to the atomic force microscope , 1998 .

[10]  Ranga Pitchumani,et al.  Stochastic modeling of nonisothermal flow during resin transfer molding , 1999 .

[11]  Edward S. Rubin,et al.  Stochastic modeling of chemical processes , 1991 .

[12]  Loren D. Lutes.  Chapter 12 – Effect of Parameter Uncertainty , 2004 .

[13]  최시영.  Silicon Pressure Sensor , 1997 .

[14]  Hao Peng,et al.  Uncertainty Analysis of Solid-Liquid-Vapor Phase Change of a Metal Particle Subject to Nanosecond Laser Heating , 2013 .

[15]  Brian H. Houston,et al.  Dynamic simulation of atomic force microscope cantilevers oscillating in liquid , 2008 .

[16]  R. Wilfinger,et al.  A frequency selective device utilizing the mechanical resonance of a silicon substrate , 1966 .

[17]  K. Ikeda,et al.  Silicon pressure sensor integrates resonant strain gauge on diaphragm , 1990 .

[18]  Jan H. J. Fluitman,et al.  Performance of thermally excited resonators , 1990 .

[19]  Ranga Pitchumani,et al.  Cure Cycle Design for Thermosetting-Matrix Composites Fabrication under Uncertainty , 2004, Ann. Oper. Res..

[20]  James E. Campbell,et al.  An Uncertainty Analysis Methodology Applied to Sheetpile Cofferdam Design , 1987 .

[21]  J. Greenwood.  Etched silicon vibrating sensor , 1984 .